Deposition of thin ferromagnetic films for application in magnetic sensor microsystems (original) (raw)

Sensors and Actuators A: Physical, 1998

Abstract

A number of soft ferromagnetic compositions have been used to fabricate thin-film cores for magnetic sensor microsystems. Techniques based on magnetron sputtering and laser ablation deposition have been extensively explored. The properties of the films have been found to depend strongly on a particular deposition regime and the type of material and, weakly, on an a priori difference between the

Petr Nikitin hasn't uploaded this paper.

Let Petr know you want this paper to be uploaded.

Ask for this paper to be uploaded.