A Review Paper on MEMS Cantilever Radio Frequency Switch (original) (raw)
Related papers
Comparative Study of Cantilever RF MEMS Switch
Materials Today: Proceedings, 2017
In a MEMS based RF switch Cantilever beam is an element that is fixed at one end and free from another side. The electrostatic actuation process occurs on the beam and it will deflect from an original position. As the Electrostatic force increases, the zcomponent displacement produced in the beam is also increases. The beam is placed at the 2µm height from the ground substrate. The cantilever works as a switch which operates as ON or OFF. When the switch is ON its capacitance increases and when it is OFF its capacitance decreases. When applied actuation voltage reaches to Pull-in-voltage the cantilever connects with the ground electrode. This paper explores the concept of increase in flexibility, switching speed, low power consumption, low actuation voltage and reduction in squeeze film damping. The various types of cantilever switch provide discrete displacement corresponding to actuation voltage. In this paper we simulated the cantilever switch with various shapes. The simulation is done using COMSOL MULTIPHYSICS software.
A Novel Design of Cantilever RF MEMS Series Switch
This paper presents novel design of various configurations of cantilever type Radio Frequency Micro Electro Mechanical Systems (RF MEMS) Series Switch. The paper emphasizes on study of Actuation Voltage of RF MEMS switches. Actuation voltages of uniform cantilever switches has been compared with cantilever switches supported on three bars (non-uniform switch) for various geometric configuration and material properties. It is observed from the simulation results that reduction in actuation voltage as high as 5V can be achieved by reducing the anchorage width. Also, use of mica with higher dielectric constant over silicon nitride as dielectric layer yields considerable reduction in actuation voltage.
Design of low actuation voltage RF MEMS cantilever switch
2008 International Conference on Recent Advances in Microwave Theory and Applications, 2008
This paper presents novel design of various configurations of cantilever type Radio Frequency Micro Electro Mechanical Systems (RF MEMS) Series Switch. The paper emphasizes on study of Actuation Voltage of RF MEMS switches. Actuation voltages of uniform cantilever switches has been compared with cantilever switches supported on three bars (non-uniform switch) for various geometric configuration and material properties. It is observed from the simulation results that reduction in actuation voltage as high as 5V can be achieved by reducing the anchorage width. Also, use of mica with higher dielectric constant over silicon nitride as dielectric layer yields considerable reduction in actuation voltage.
In a MEMS based RF switch Cantilever beam is an element that is fixed at one end and free from another side. The electrostatic actuation process occurs on the beam and it will deflect from an original position. As the Electrostatic force increases, the z-component displacement produced in the beam is also increases. The beam is placed at the 2µm height from the ground substrate. The cantilever works as a switch which operates as ON or OFF. When the switch is ON its capacitance increases and when it is OFF its capacitance decreases. When applied actuation voltage reaches to Pull-in-voltage the cantilever connects with the ground electrode. This paper explores the concept of increase in flexibility, switching speed, low power consumption, low actuation voltage and reduction in squeeze film damping. The various types of cantilever switch provide discrete displacement corresponding to actuation voltage. In this paper we simulated the cantilever switch with various shapes. The simulation is done using COMSOL MULTIPHYSICS software.
Design and Analysis of Mems Cantilever Switch
2015
The intent of this paper is to discuss about the MEMS switch ,its design in an optimized way .Various aspect in which MEMS switches are advantageous over semiconductor switches are also compared in it. Mechanical coaxial and waveguide switches have low insertion loss, large off-state isolation and high power handling capabilities, but they are bulky, heavy and slow. The semiconductor switches have faster switching speed and are small in size and weight but have high insertion loss hence more static power consumption and less isolation and power handling capacity; Whereas MEMS switches have the advantages of both , the Mechanical and Semiconductor Switches .They provide higher RF performance , low static power consumption but with smaller size ,weight and is available at low cost .The MEMS switches are designed and its result are obtained by using Coventorware and this software is explained in detail in pervious paper. Keyword: MEMS, MEMS switch.
DESIGN OF STICTIONFREE LOWER PULL IN VOLTAGE RF MEMS SWITCH USING FISHBONE CANTILEVER BEAM 1
2018
A new fishbone structure cantilever beam type RF MEMS switch has been proposed. The main advantage of this switch is that it is inherently stiction free and therefore enhances design flexibility. An analytical model developed using unit load approach for the spring constant of the proposed switch has been presented and it has been shown that the spring constant and therefore the pull in voltage (Vpi) can be considerably reduced with the proposed switch. Simulation studies conducted on two groups of devices clearly demonstrate that the pull in voltage can be reduced by 65% with ten sections. Comparision of the pull in voltage obtained in the simulation studies for devices with the theoretically estimated Vpi shows that the spring constant model presented in this paper accurately estimates the spring constant. The results of analytical studies also demonstrate that the new proposed cantilever beam can considerably reduce the pull in voltage.
Contact physics modeling and optimization design of RF-MEMS cantilever switches
2005
RF MEMS direct-contact switches exhibit many advantages over the conventional semiconductor switches; however, existing drawbacks such as low power handling, high pull-in voltage and long switch opening time are most critical. This paper presents an optimization design for an RF-MEMS cantilever direct-contact switch to achieve maximum power handling capability, minimum pull-in voltage and switch opening time simultaneously. A 2-step optimization technique is proposed to achieve the optimal design to allow for a power handling capability of 130 mW, a pull-in voltage of 52 V, and a switch opening time 4.4 μs presented. The optimization results show that substantial room exists for improving the current designs of RF MEMS direct-contact switches.
This paper deals with the RF (Radio Frequency)-MEMS (Micro-Electro-Mechanical-System) switch design using the coventorware software and its superiority over the existing technologies like PIN Diodes and Field-Effect-Transistors regarding size, power, Isolation and Insertion loss, and graphically how Pull-in voltage affects on the deflection of the switch. Also this paper deals with the fabrication process of the cantilever switch.
2018
This paper presents a novel cantilever based RF MEMS series switch. The cantilever is of a dielectric material to prevent crosstalk and for isolation between the RF and DC signal. This switch has low actuation voltage and good RF performance in the frequency range from 2 to 12 GHz. Low actuation voltages are achieved by varying the spring constant of the beam. The spring constant of the beam can be varied by varying the geometry of the beam. We have introduced geometrical variations in the beam design that have led to low actuation voltage and good RF performance. A meander shaped beam is proposed which gives the least actuation voltage. The meanders in the beam reduce the spring constant without affecting the RF performance of the switch. The proposed design has a very low Pull in voltage of 6.64V. The RF performance of the switch shows that the Return loss is-25.65dB at 9.8GHz.The isolation is about-64.02dB and the insertion loss is about -0.2065dB at 9.7GHz
A new type of high bandwidth RF MEMS switch - Toggle switch
Journal of Semiconductor Technology and Science
A new type of RF MEMS switch for low voltage actuation, high broadband application and high power capability is presented. Mechanical and electromagnetic simulations of this new RF MEMS switch type are shown and the fabrication process and measurement results are given. The switching element consists of a cantilever which is fixed by a suspension spring to the ground of the coplanar line. The closing voltage is 16V. The switches exhibit low insertion loss (<0.85dB@30GHz) with good isolation (>22dB@30GHz).