EFFECT OF NITROGEN GAS RATIO ON THE PROPERTIES OF TI-ZR-N COATINGS DEPOSITED BY PULSED MAGNETRON SPUTTERING (original) (raw)
Related papers
2017
The aim of this paper was to study the effectiveness of N2/Ar gas ratio on the mechanical and tribological properties of Ti-Zr-N films coated on (AISI 304 stainless steel) substrate. The thin films were produced at 150 W pulsed magnetron sputtering (PMS) technique operated for 90 min. The structure and tribo-mechanical properties of the Ti-Zr-N coatings were investigated at different N2 /Ar gas pressure ratio. X-ray diffraction (XRD), microhardness, surface roughness, wear and friction, corrosion performance and surface energy were investigated. The analysis of X-ray diffraction (XRD) indicated a formation of solid solution phase of (Ti-Zr)N with (FCC) structure and a chemical compound phase of TiN. The solid solution phase (Ti-Zr)N has the orientation (111). The microhardness of the thin films has high values compared to associated value of (AISI 304 stainless steel) substrate; up to 4-folds. Furthermore, the wear performance was improved from 73.06 mm 3 /m for AISI substrate to 5....
Wear, 2012
The tribological properties of sputter-deposited MoS 2 and MoS 2-Ti films were investigated in this study. The deposited films were characterized using microprobe analysis for composition and x-ray diffraction (XRD) for structure. The frictional properties of the films were examined using a pin-on-disk (POD) with counterfaces of 440C steel, aluminum, tungsten carbide and alumina. The tests were run under low (25%), medium (50%) and high (70%) humidity levels. MoS 2 films without Ti were first examined under cyclic humidity conditions between 25 and 50% R/H. The results showed that for steel, WC and alumina counterfaces, the effect of the higher humidity was to increase the friction, but lower friction could be recovered when the humidity was reduced back to 25%. For films containing Ti, the best results were obtained at a concentration of 20 at. % Ti. These films performed well for steel and WC counterfaces, but poorly against aluminum. The effect of deposition temperature (up to 450 o C) was examined for MoS 2 and MoS 2-5% Ti films. Higher temperatures yielded more crystalline films, but the addition of Ti partially countered this effect. The POD test showed that at medium humidity levels the friction decreased with temperature, but increased slightly when tested under low humidity. In all cases, the 5% Ti-containing films had a fiction coefficient of about 0.1 below that for films without Ti.
2014
The demand for economical high-performance materials has brought attention to the development of advanced coatings. Recent advances in high power magnetron sputtering (HPPMS) have shown to improve tribological properties of coatings. These coatings offer increased wear and oxidation resistance, which may facilitate the use of more economical materials in harsh applications. This study demonstrates the use of novel forms of HPPMS, namely modulated pulsed-power magnetron sputtering (MPPMS) and deep oscillation magnetron sputtering (DOMS), for depositing TiN and Ti 1-x Al x N tribological coatings on commonly used alloys, such as Ti-6Al-4V and Inconel 718. Both technologies have been shown to offer unique plasma characteristics in the physical vapor deposition (PVD) process. High power pulses lead to a high degree of ionization compared to traditional directcurrent magnetron sputtering (DCMS) and pulsed magnetron sputtering (PMS). Such a high degree of ionization was previously only achievable by cathodic arc deposition (CAD); however, CAD can lead to increased macroparticles that are unfavorable in high friction and corrosive environments. MPPMS, DOMS, and other HPPMS techniques offer unique plasma characteristics and have been shown to produce coatings with refined grain structure, improved density, hardness, adhesion, and wear resistance. Using DOMS and MPPMS, TiN and Ti 1-x Al x N coatings were deposited using PMS to compare microstructures and tribological performance. For Ti 1-x Al x N, two sputtering target compositions, 50Ti-50Al and 30Ti-70Al, were used to evaluate the effects of MPPMS on the coating"s composition and tribological properties. Scanning electron microscopy (SEM), transmission electron microscopy (TEM), and X-ray diffraction (XRD) were used to characterize microstructure and crystallographic texture. Several tribological properties were evaluated including: wear rate, coefficient of friction, adhesion, and nanohardness. Results show that substrate material can have a significant effect on adhesion and the mechanical response between the coating and substrate. Depending on deposition parameters and the selected material MPPMS and DOMS are promising alternatives to DCMS, PMS, and CAD.
Surface and Coatings Technology, 2008
Zirconium nitride was deposited by reactive unbalanced magnetron sputtering at different N 2 partial pressures, on an AISI 316L stainless steel substrate. The mechanical properties of the coatings were evaluated by means of nanoindentation tests employing a Berkovich indenter and loads which varied between 120-9000 µN. The sliding wear behavior of the substrate-coating systems was studied under a normal load of 2 N using a ballon-disc tribometer, with an AISI 52100 ball (6 mm diameter) as counterpart. It has been found that N 2 partial pressure has a significant effect both on the hardness and corresponding Young's modulus of the coatings. As the N 2 partial pressure increases from 1 × 10 − 4 Torr to 10 × 10 − 4 Torr, the hardness and Young's modulus of the coatings decrease from 26 to 20 GPa and 360 to 280 GPa, respectively. The nanoindentation tests revealed the presence of a third oxide layer (10 nm thick, approximately) on the surface of the coating. Scanning electron microscopy (SEM) analysis performed on the worn triboelements indicated that both abrasive and adhesive wear mechanisms could take place in addition to the substrate plastic deformation. The deposition conditions and coating mechanical integrity determine the predominant wear mechanism.
Comparative Study of Tribological and Corrosion Characteristics of TiCN, TiCrCN, and TiZrCN Coatings
Coatings
Coatings based on titanium carbonitride alloyed with zirconium and chromium were deposited using the method of reactive magnetron sputtering on the surface of titanium VT1–0. The effect of alloying titanium carbonitride with zirconium and chromium on the tribo- and corrosion properties of the coating has been studied. Coatings with different compositions were formed by changing the ratio of alloying elements to titanium in a single target. To study the obtained coatings, a scanning electron microscopy, nanoindentation, sliding wear test (ball on disk method), and corrosion tests in 0.5 M Na2SO4 and 30% NaCl solution were used. As a result of wear and corrosion tests, friction coefficients, mass index, and corrosion rate of alloyed and pure titanium carbonitride coatings were obtained. The average coefficient of friction of the coatings varied in the range of 0.17–0.31. The values of nanohardness are determined depending on the composition of the coatings. From corrosion data, it is ...
PRZEGLĄD ELEKTROTECHNICZNY
By vacuum-arc evaporation of multielement Ti+Zr+Nb cathode in nitrogen atmosphere, (Ti-Zr-Nb)N coatings have been deposited on steel substrates. The coatings are characterized by a columnar structure with nanosized (10-63 nm) crystallites of the main FCC nitride phase (Ti-Zr-Nb)N. Such coatings seem to having prospects as protective ones for couples of friction and cutting tools. Streszczenie. Metodą próżniowo-łukowego osadzania z katod systemu Ti+Zr+Nb w atmosferze azotu otrzymano powłoki na podłożach (Ti-Zr-Nb)N. Powłoki charakteryzują się słupową strukturą z nanowymiarowymi (10-63 nm) kryształami w podstawie których jest FCC faza azotku Ti-Zr-Nb)N. (Fizyko-mechaniczne właściwości powłok (Ti-Zr-Nb)N otrzymanych metodą próżniowo-łukową).
Materials Science and Engineering B-advanced Functional Solid-state Materials, 2010
In order to increase the performance of hard coatings for industrial application, Ti/TiN, Zr/ZrN and TiN/ZrN multilayers were deposited onto Si(1 0 0) and AISI 5160 steel substrates via r.f. (13.56 MHz) multi-target magnetron sputtering technique. The crystallography structures of Ti/TiN, Zr/ZrN and TiN/ZrN multilayers were evaluated via X-ray diffraction analysis (XRD). The composition, chemical-depth distribution and cross-sectional morphology of the films were characterized by EDX, SIMS, and SEM. The enhancement of mechanical properties and adherence strength behavior were determined via nanoindentation and scratch test, respectively. From these results, it was found that hardness and critical load of all multilayer films depends on the bilayer period ( ) and bilayer number (n). Moreover, the TiN/ZrN multilayer films exhibit the highest hardness (30 ± 1 GPa) and critical load (60 ± 1 N) in relation to Ti/TiN and Zr/ZrN multilayers. The different mechanical performances and mechanisms in the multilayers group were observed and discussed in this paper, suggesting the possibility to use AISI 5160 steel coated with multilayers as cutting tools.
2010
In order to increase the performance of hard coatings for industrial application, Ti/TiN, Zr/ZrN and TiN/ZrN multilayers were deposited onto Si(1 0 0) and AISI 5160 steel substrates via r.f. (13.56 MHz) multi-target magnetron sputtering technique. The crystallography structures of Ti/TiN, Zr/ZrN and TiN/ZrN multilayers were evaluated via X-ray diffraction analysis (XRD). The composition, chemical-depth distribution and cross-sectional morphology of the films were characterized by EDX, SIMS, and SEM. The enhancement of mechanical properties and adherence strength behavior were determined via nanoindentation and scratch test, respectively. From these results, it was found that hardness and critical load of all multilayer films depends on the bilayer period () and bilayer number (n). Moreover, the TiN/ZrN multilayer films exhibit the highest hardness (30 ± 1 GPa) and critical load (60 ± 1 N) in relation to Ti/TiN and Zr/ZrN multilayers. The different mechanical performances and mechanisms in the multilayers group were observed and discussed in this paper, suggesting the possibility to use AISI 5160 steel coated with multilayers as cutting tools.
Wear studies of (Ti–Al)N coatings deposited by reactive magnetron sputtering
Wear, 2005
Titanium-aluminium nitride coatings were deposited on stainless steel substrates by reactive dc magnetron sputtering using a composite target. Coatings were prepared by varying nitrogen flow ratio systematically. Wear studies of (Ti-Al)N coatings were studied methodically for all the coated samples. Wear tests were performed on Plint make reciprocating wear tester with ball-on-plate configuration (model TE-70).
Thin film ceramic coatings are extensively used to improve the surface properties of the components especially in aerospace applications, surgical, tool industry, artificial implants etc. To enhance the surface properties of stainless steel, the substrate was coated with a 1μm thick coating of Ti-Nb-N by reactive DC magnetron sputtering at different N2 flow rates, substrate biasing and Nb-Ti ratio. The coated samples were evaluated by the following techniques: hardness by Knoop micro-hardness tester, phase analysis by X-ray Diffraction (XRD), compositional analysis by Energy Dispersive X-ray Spectroscopy (EDS) and adhesion by scratch test. The micro-hardness test yielded appreciable enhancement in the surface hardness with the highest value being1450 HK. Presence of three prominent phases namely NbN, Nb2N3 and TiN resulted from the XRD analysis. EDS analysis revealed the presence of Ti, Nb and Nitrogen. Adhesion was evaluated on the basis of critical loads for cohesive (Lc1) and adhesive (Lc2) failures with values varying between 7–12N and 16–25 N respectively, during scratch test for coatings on SS substrates.