IJERT-Design, Simulation and Analysis of NEMS based Piezoresistive Pressure Sensor (original) (raw)
2020, International Journal of Engineering Research and Technology (IJERT)
https://www.ijert.org/design-simulation-and-analysis-of-nems-based-piezoresistive-pressure-sensor https://www.ijert.org/research/design-simulation-and-analysis-of-nems-based-piezoresistive-pressure-sensor-IJERTV9IS070342.pdf In this work, we present the design, simulation and analysis of NEMS based piezoresistive nano pressure sensor operating over a pressure range of 0 to 0.5MPa. The entire sensor dimension is in nano scale. Nano piezoresistors are placed and are connected in the form of Wheatstone Bridge, on the diaphragm. The sensor is simulated for the mechanical and electrical performance parameters. The designed sensor has a sensitivity of 1.28 μV/Pa, which is better at nano scale. Such kind of pressure sensors are best suited for medical pressure sensing applications. Keywords-NEMS, Nano piezoresistive pressure sensors, sensitivity. I. INTRODUCTION Nanotechnology has paved way for many innovative devices that can bring about the change in the current sensing and actuation technology. Nanotechnology can develop sensors with enhanced sensitivity and quick response. Microelectronics technology is now slowly moving towards nanoelectronics technology. Currently MEMS (Micro Electro-Mechanical Systems) technology is used for development of sensors and actuators, where the scale happens to be in microns. NEMS (Nano Electro-Mechanical Systems) is an extension of MEMS, here the scale is in nano. Large number of sensors have been developed using MEMS technology, but using Nanotechnology the sensors are expected to perform better than as they use to in MEMS. In the work that we demonstrate in this paper is design and development of nano piezoresistive pressure sensor. With the intent of making devices small, researchers have started using NEMS as an alternative to MEMS technology. Although fabrication of NANO structures might not be as simple as it is for MEMS, but nano devices could perform better then MEMS devices. Piezoresistive pressure sensors in its basic form will contain a thin diaphragm over which four piezoresistors are placed and are connected in the form of Wheatstone bridge. When pressure is applied on diaphragm it will displace and transfer the applied stress on the piezoresistors which in turn convert the applied stress into readable electrical potential. In the works presented in [1]-[3] have designed and analyzed MEMS based piezoresistive pressure sensors and have drawn lot of facts about these devices such as 1. Square diaphragm is best suited for design of piezoresistive pressure sensor. 2. Piezoresistors must be placed at the high stress regions, 3.
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