An electron beam lithography and digital image acquisition system for scanning electron microscopes (original) (raw)
2007, Journal of Microscopy
AI-generated Abstract
The paper discusses the development of a cost-effective electron beam lithography (EBL) and digital image acquisition system tailored for scanning electron microscopes (SEMs). It emphasizes the feasibility of retrofitting existing SEMs to perform EBL, highlighting advancements in microcontroller technology and USB interfaces that enable simple assembly and flexible applications in small research laboratories. The proposed system aims to make high-resolution lithography accessible to more researchers by reducing equipment costs while maintaining the potential for custom configurations.
Related papers
A Software Approach to Improving SEM Resolution, Image Quality, and Productivity
Microscopy Today, 2017
This paper describes how software can be used to improve the resolution and quality of scanning electron microscope images based on a rapid two-step process. In the first step, an image of a fine-particle dispersion is used to determine the point spread function (PSF) of the electron beam. In the second, the PSF is used with deconvolution and regularization algorithms to restore an image in a manner that best describes the details of the original object examined. In addition to its value in image restoration, knowledge of the PSF is a valuable means for both instrument optimization and performance monitoring.
A simple electron-beam lithography system
Ultramicroscopy, 2005
A large number of applications of electron-beam lithography (EBL) systems in nanotechnology have been demonstrated in recent years. In this paper we present a simple and general-purpose EBL system constructed by insertion of an electrostatic deflector plate system at the electron-beam exit of the column of a scanning electron microscope (SEM). The system can easily be mounted on most standard SEM systems. The tested setup allows an area of up to about 50 Â 50 mm to be scanned, if the upper limit for acceptable reduction of the SEM resolution is set to 10 nm. We demonstrate how the EBL system can be used to write three-dimensional nanostructures by electron-beam deposition. r
Digital image recording, image display and characterisation in Stem
Ultramicroscopy, 1982
The design and construction of a digital recording system is described for up to 8 image signals simultaneously available in STEM. Such an array of images allows improved signal-to-noise ratio in a composite derived signal and solution of the "phase problem" of the specimen complex electron transmission. A simple method of enhancing the contrast of single monochrome images is described within a brief description of various possibilities for image display. Finally, a description is given of an on-line method of estimating the image defocus by making use of the changes with focus of the image contrast of the specimen-supporting film.
An Automatic Image Acquisition and Analysis System for a Scanning Electron Microscope
A restriction on the wider use of image processing and analysis methods in many disciplines has been the need to analyse large numbers of images to provide the necessary statistical basis for comparison between one specimen and another. Many image processing and ana-lysis routines such as image restoration, orientation analysis, objective segmentation for porosity analysis, and granulometric grey-scale morphological methods are well established. Many are readily adapted to batch processing without the need for operator intervention, but the acquisition of the raw images themselves becomes a constraint. An image processing facility has been adapted to control automatically a Hitachi S800 scanning electron microscope and to provide basic image capture facilities. This in turn exchanges data with a separate dedicated image analysis facility running on a personal computer. Basic control of brightness, magnification, focusing and stage position are programmed to include various image cap...
Loading Preview
Sorry, preview is currently unavailable. You can download the paper by clicking the button above.