Measurements of the thickness distribution of thin films with a slit-beam-profile reflectometer (original) (raw)

The thickness distribution of single-layer thin f ilms is measured with a slit-beam-prof ile ref lectometer. A convergent slit beam generated by a cylindrical lens is projected onto a specimen. A CCD chip with a pixel matrix of 512 3 480 is used to detect the intensity distribution of the ref lected beam, which is passed through another cylindrical lens. By analyzing the picture taken by the CCD, we can obtain information about the angular ref lectance at each ref lecting point along the slit line, and the thickness or the refractive index at each point can be evaluated by mathematical f itting to a ref lectance formula.