Determination of the thickness and optical constants of thin films from transmission spectra (original) (raw)
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Determination of the thickness and optical constants of amorphous silicon
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DETERMINATION OF THE OPTICAL CONSTANTS OF THIN FILMS FROM OPTICAL TRANSMISSION DATA
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A new calculating method to deduce optical constants n, k and thickness d from the fringe pattern of the transmission spectrum is proposed. In this method the optical parameters are determined using only one curve of the transmission spectra even for thin films where nd /4. The method is demonstrated by experimental data obtained using evaporated vacuum deposited TiO2 thin film on a glass substrate. The experimental values are in very good agreement with those calculated using the above described technique.