Polysilicon Microgripper (original) (raw)
1992, Sensors and Actuators A: …
A polysilicon electrostatic comb-drive microgripper has been designed and fabricated using surface micromachining on a silicon wafer. It features flexible cantilever comb-drive arms with a bidirectional actuation scheme and over-range protectors. Three different electromechanical models are developed and, along with fabrication constraints, are employed to design the microgripper and to simulate its performance. Experiments demonstrate that a gripping range of 10 pm can be effected with an applied potential variation of less than 20 V. The motion dependence on drive voltage is measured and compared with predictions from models; it is observed to be smooth, stable, and controllable. Experimental behavior (voltage versus displacement) is characterized for voltages up to 50 v.
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