Thermal compensation of gravimetric sensors using shear horizontal acoustic plate modes on quartz (original) (raw)

Proceedings of IEEE Ultrasonics Symposium, 1993

Abstract

Shear horizontal acoustic plate mode (SH-APM) devices have been investigated as gravimetric sensors in many applications for measurements in liquid and in gas phases. The temperature behavior has not been examined in those applications. Thermal effects appear as parasitic and as an important limiting factor of the ultimate sensitivity of SH-APM sensors. In this paper, temperature sensitivity is modelled and

M Hoummady hasn't uploaded this paper.

Let M know you want this paper to be uploaded.

Ask for this paper to be uploaded.