XPS characterization of TiO2 layers deposited on quartz plates (original) (raw)

Journal of Physics Conference Series

Abstract

TiO2 layers for gas sensing applications were obtained by Liquid Phase Deposition (LPD). The layers were deposited on gold-coated piezoelectric quartz crystals. The surface structure, morphology and chemical properties were analysed by X-ray diffraction (XRD), Scanning Electron Microscopy (SEM) and X-ray Photoelectron Spectroscopy (XPS). SEM showed that the layers were porous and composed of uniform crystalline grains. XPS indicated them to be non-stoichiometric.

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