Zinc telluride films by photoenhanced metalorganic chemical vapor deposition (original) (raw)

Polycrystalline films of zinc telluride (ZnTe) have been deposited on glass and conducting semiconductor coated glass substrates at 270~176 C by photoenhanced metalorganic chemical vapor deposition (PECVD) using the reaction of dimethylzinc (DMZn) or diethylzinc (DEZn) and diisopropyltellurium (DIPTe) in hydrogen under atmospheric pressure. The deposited films are always of p-type conductivity. Their properties are affected by the DMZn/DIPTe or DEZn/DIPTe molar ratio in the reaction mixture. The optimum DMZn/DIPTe ratio has been found to be approximately 0.9 on the basis of the open-circuit voltage of ZnTe/CdS heterojunctions and photoconductivity measurements. Without intentional doping, the deposited films are of high resistivity (>107 ohm-cm) at room temperature, and the resistivity of these films has been controlled by using arsine as a dopant. The structural, optical, and electrical properties of ZnTe films have been characterized.