Motion of a Micro/Nanomanipulator using a Laser Beam Tracking System (original) (raw)
Related papers
Robust laser beam tracking control using micro/nano dual-stage manipulators
2013 IEEE/RSJ International Conference on Intelligent Robots and Systems, 2013
This paper presents a study of the control problem of a laser beam illuminating and focusing a microobject subjected to dynamic disturbances using light intensity for feedback only. The main idea is to guide and track the beam with a hybrid micro/nanomanipulator which is driven by a control signal generated by processing the beam intensity sensed by a four-quadrant photodiode. Since the pointing location of the beam depends on real-time control issues related to temperature variation, vibrations, output intensity control, and collimation of the light output, the 2-D beam location to the photodiode sensor measurement output is estimated in real-time. We use the Kalman filter (KF) algorithm for estimating the state of the linear system necessary for implementing the proposed track-following control approach. To do so a robust master/slave control strategy for dual-stage micro/nanomanipulator is presented based on sensitivity function decoupling design methodology. The decoupled feedback controller is synthesized and implemented in a 6 dof micro/nanomanipulator capable of nanometer resolution through several hundreds micrometer range. A case study relevant to tracking a laser-beam for imaging purposes is presented.
Robust nanomanipulation control based on laser beam feedback
2014 IEEE/RSJ International Conference on Intelligent Robots and Systems, 2014
This paper presents a study of the control problem of a laser beam illuminating and focusing a microobject subjected to dynamic disturbances using light intensity for feedback only. The main idea is to guide and track the beam with a hybrid micro/nanomanipulator which is driven by a control signal generated by processing the beam intensity sensed by a four-quadrant photodiode. Since the pointing location of the beam depends on real-time control issues related to temperature variation, vibrations, output intensity control, and collimation of the light output, the 2-D beam location to the photodiode sensor measurement output is estimated in real-time. To overcome this problem, the Particle Filter (PF) algorithm is used to estimate the position of laser beam. The dual manipulators are controlled by combining different performance dynamics (micro and nano manipulators) in order to track a laser beam with very-high precision in a dynamics operating mode.
2014 American Control Conference, 2014
This paper reports a control strategy of two AFM gripper for manipulation on analysis Beam, using dual micro/nano manipulators in order to grippe a micro spherical ball and tacking-maintain on the focus of laser beam. The main idea is to control and drive AFM gripper to expose micro samples in the laser beam by localization of the maximum intensity laser beam given by a four-quadrant photodiode. The focalization of analysis Beam used for microhandling is few micrometer that making the intensity measurement sensitive at the externals variations and positioning of the four-quadrant photodiode affecting the control of the gripper and position the sample far of the focalization of laser beam. To overcome this problem, the Particle Filter (PF) algorithm is used to estimate the position of laser beam.The dual manipulators is controlled by combine different performance dynamics (micro manipulator and nano manipulator) to track a laser beam with high precision.
Measurement Science and Technology, 2014
This paper presents an analysis of the tracking performance of a planar three Degrees of Freedom (DOF) flexure-based mechanism for micro/nano manipulation, utilising a tracking methodology for the measurement of coupled linear and angular motions. The methodology permits trajectories over a workspace with large angular range through the reduction of geometric errors. However, when combining this methodology with feedback control systems, the accuracy of performed manipulations can only be stated within the bounds of the uncertainties in measurement. The dominant sources of error and uncertainty within each sensing subsystem are therefore identified, which leads to a formulation of the measurement uncertainty in the final system outputs, in addition to methods of reducing their magnitude. Specific attention is paid to the analysis of the vision-based subsystem utilised for the measurement of angular displacement. Furthermore, a feedback control scheme is employed to minimise tracking errors, and the coupling of certain measurement errors is shown to have a detrimental effect on the controller operation. The combination of controller tracking errors and measurement uncertainty provides the bounds on the final tracking performance.
Experimental studies on a micromanipulator for micro/nano manipulation
APCCAS 2008 - 2008 IEEE Asia Pacific Conference on Circuits and Systems, 2008
This paper presents an experiment-based study on an XY micromanipulator to achieve a sub-micron resolution for micro/nano scale manipulation. The micromanipulator is designed with both input and output decoupling properties, which allows the adoption of a SISO controller for the micromanipulation system. Based on the system identification, a digital lag-lead feedback controller is designed to compensate for the hysteresis and creep of the piezoelectric actuator. In view of the relative long control interval, a feedforward controller is then designed to implement a zero phase error tracking control (ZPETC). The positioning performances of the micromanipulator in terms of resolution, accuracy and repeatability, and tracking performances of 1-D and 2-D motion have been tested by several experimental studies. The experimental results show that the developed micromanipulator is sufficient for micro-positioning, whereas its tracking performances are expected to be further improved.
American Journal of Applied Sciences, 2013
High-precision positioning of laser beams has been a great challenge in industry due to inevitable existence of noise and disturbance. The work presented in this study addresses this problem by employing two different control strategies: Proportional Integral Derivative (PID) control and state feedback control with an observer. The control strategies are intended to stabilize the position of a laser beam on a Position Sensing Device (PSD) located on a Laser Beam Stabilization (or, laser beam system) system. The laser beam system consists of a laser source, a Fast Steering Mirror (FSM), a PSD and a vibrating platform to generate active disturbance. The traditional PID controller is widely used in industry due to its satisfactory performance, various available tuning methods and relatively straightforward design processes. However, design of filters to obtain the derivative signal is challenging and can unexpectedly distort the dynamics of the system being controlled. As an alternative, use of an Observer-Based State Feedback (OBSF) method is proposed and implemented. The state-space model of the laser beam system is utilized and an observer is applied to estimate the state of the system, since all the state variables cannot be measured directly. For observer design, eigenvalue assignment and optimal design methods are used and compared in terms of system performance. Also a comparative analysis between the PID and OBSF controllers is provided. Simulations and experimental results show that the OBSF controller rejects disturbance better and has a simpler design procedure.
Nano-precision control of micromirrors using output feedback
42nd IEEE International Conference on Decision and Control (IEEE Cat. No.03CH37475), 2003
Micromirror arrays may be used as spatial light modulators, to vary the amplitude and phase of an incident image. The difficulty of controlling analog micromirrors to within a fraction of a wavelength of the incident light-that is, to within a few nanometers-has led to the development and successful commercialization of digital devices, in which the components take one of only two possible configurations. In this paper we revisit true analog operation, in light of recent advances in nonlinear control. Our focus is electrostatically actuated mirrors, for which control objectives include extending the range of motion, improving transient performance, improving positioning accuracy and preventing electrode contact. We consider two models of individual micromirrors, suitable for controller design. The first treats each micromirror as a rigid body, and allows arbitrary rotation and translation. This model is developed in the context of dynamics on the Lie group SE(3). We simulate the performance of an observer-based controller for this system. The second model, based on work by Pelesko, is developed directly from a PDE representation of an electrostatically forced membrane. We show via simulation that an unstable equilibrium point of this model may be stabilized by proportional output feedback.
Evaluation of different control algorithms for a micromanipulation system
Int. Conf. Engineering …, 2006
In this paper the development of a micromanipulation system with stereoscopic imaging and different control algorithms is reported. The system consists of a commercially available micromanipulator (Kleindiek MM3A), an electromagnetically actuated microgripper, 2 external CCD cameras performing stereovision, a stereoscopic lightmicroscope and a control PC. As the micromanipulator does not possess positional encoders the microgripper's position has to be provided by the implemented visual feedback system. Once this position is known, inverse kinematics is applied to calculate the position of the micromanipulator's axes. The implemented adaptive discrete P-control is evaluated and compared to an artificial neural network model. To get a better understanding of the dynamic model of the micromanipulator, a characterization of its axes is performed. The derived data also assisted the control improvement of the micromanipulator.
Feedback Control of MEMS Micromirrors Subject to Parametric Uncertainty
Volume 3: 19th International Conference on Design Theory and Methodology; 1st International Conference on Micro- and Nanosystems; and 9th International Conference on Advanced Vehicle Tire Technologies, Parts A and B, 2007
This paper presents research on the development of microelectromechanical systems (MEMS) micromirror arrays with precise and accurate positioning enabled by the use of closed-loop control techniques. The MEMS mirror arrays are one degree-of-freedom, electrostatically actuated and exhibit nonlinear actuation profiles that include pull-in and hysteresis. The device performance is subject to parametric uncertainties from the fabrication process. Preliminary proportionalintegrator (PI) controllers are studied in simulation on the nonlinear system to explore issues in the control development. Two different model linearization methods are presented to examine the best way to approximate the nonlinear behaviors using linear models. The effects of parametric uncertainties on the open-loop plant response are considered. It is evident based on these studies that the open-loop response is very sensitive to model uncertainties, while using closed-loop control can achieve input-tracking despite uncertainties in the plant. The work-in-progress includes the development of an optical test bed for the experimental validation of the results presented in this paper.
Development of a Micromanipulation System with Force Sensing
2007
This article provides in-depth knowledge about our undergoing effort to develop an open architecture micromanipulation system with force sensing capabilities. The major requirement to perform any micromanipulation task effectively is to ensure the controlled motion of actuators within nanometer accuracy with low overshoot even under the influence of disturbances. Moreover, to achieve high dexterity in manipulation, control of the interaction forces is required. In micromanipulation, control of interaction forces necessitates force sensing in milli-Newton range with nano-Newton resolution . In this paper, we present a position controller based on a discrete time sliding mode control architecture along with a disturbance observer. Experimental verifications for this controller are demonstrated for 100, 50 and 10 nanometer step inputs applied to PZT stages. Our results indicate that position tracking accuracies up to 10 nanometers, without any overshoot and low steady state error are achievable. Furthermore, the paper includes experimental verification of force sensing within nano-Newton resolution using a piezoresistive cantilever endeffector. Experimental results are compared to the theoretical estimates of the change in attractive forces as a function of decreasing distance and of the pull off force between a silicon tip and a glass surface, respectively. Good agreement among the experimental data and the theoretical estimates has been demonstrated.