Technological development of THz microfluidic microsystems for biological spectroscopy (original) (raw)

Infrared and Millimeter Waves, Conference Digest of the 2004 Joint 29th International Conference on 2004 and 12th International Conference on Terahertz Electronics, 2004., 2004

Abstract

We investigate a possible fabrication of microfluidic MEMS dedicated to the THz spectroscopy in a mixing technology based on silicon substrate coated with a thick layer of polymer. This layer is useful for the microfluidic circulation and the electromagnetic propagation. We use an original deposition process realized by RPECVD (remote plasma enhanced vapor deposition), called also "cold plasma". We obtain

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