The Deposition of Metallic and Non-Metallic Thin Films Through the Use of Boron Clusters (original) (raw)

MRS Proceedings, 1988

Abstract

ABSTRACTNew borane clusters and their corresponding transition and rare earth metal complexes are currently being investigated in our laboratories for their utility as unique source materials for the formation of both metallic and non-metallic thin films. These borane cluster complexes exhibit highly favorable properties for use in OMVPE processes, such as; (1) relatively high volatility, (2) anticipated high stability of the ligand itself to provide clean ligand-metal dissociations, (3) high temperature stabilities of the complexes, (4) readily preparable in significant quantities, and (5) availability of theoretical and spectroscopic probes of structure-reactivity relationships. In this work, we have prepared both non-metallic thin films, including materials such as boron nitride, and metallic thin films (both the transition and rare earth metals) through the use of these unique cluster materials.Boron nitride has been investigated as a potential hard coating for use as an insulat...

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