CMOS-based calorimetric chemical microsensors (original) (raw)

The design, fabrication, and characterization of CMOS calorimetric chemical microsensors were explored in this thesis. These microsensors detect the enthalpy change during analyte absorption/desorption processes utilizing polymer films as chemically sensitive layers for volatile organic compounds (VOCs). Key findings include the optimization of sensor geometry via finite element simulations, achievement of low detection limits for various analytes, and the successful integration of dynamic modeling to understand sensor responses.