Screen-offset printing for fine conductive patterns (original) (raw)

2014, Microelectronic Engineering

Screen printing is a useful method for fabricating electrodes or signal wires of electronic devices. However, finer patterns, e.g., 50-lm-wide, are difficult to form. Herein, we introduce a newly developed printing technique called ''screen-offset printing,'' as a candidate method for solving this problem. In this process, first, ink patterns are screen-printed on a silicone-resin blanket; they are then transferred from the blanket to an object. In the present study, we analyze the features of screen-offset printing by observing printed conductive patterns, and elucidate the impact of this method by comparing the experimental results of screen-offset printing and conventional screen printing. In addition, we demonstrate the fabrication of fine patterns with a line and space (L/S) of 50/50 and 30/30 lm.

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