Synthesis, Characterization and Applications of Barium Strontium Titanate Thin Film Structures (original) (raw)
AI-generated Abstract
This investigation focuses on the synthesis and characterization of Barium Strontium Titanate (BST) thin film structures deposited using RF magnetron sputtering and a combined method involving sol-gel techniques. A 'stacked' deposition process was employed to enhance film thickness and improve electrical properties, with evaluations conducted using various characterization techniques, including X-ray diffraction and atomic force microscopy. The results indicate that the stacked BST films exhibit superior electrical characteristics, including significant improvements in leakage and tunability, showing promise for advanced electronic applications and energy storage solutions.
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