Patterning of SiO 2 nanoparticle–PMMA polymer composite microstructures based on soft lithographic techniques (original) (raw)
Patterning of SiO 2 nanoparticle–PMMA polymer composite microstructures based on soft lithographic techniques
Microelectronic Engineering, 2011
Abstract
Soft lithography and self-assembly provide powerful means of organizing colloidal solution of synthesized nanoparticles (NPs) for a wide variety of application. Pattern transfer of silicon dioxide (SiO 2 ) nanoparticlespolymethylmethacylate (PMMA) nanocomposite was investigated ...
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