Patterning of SiO 2 nanoparticle–PMMA polymer composite microstructures based on soft lithographic techniques (original) (raw)

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Patterning of SiO 2 nanoparticle–PMMA polymer composite microstructures based on soft lithographic techniques

Microelectronic Engineering, 2011

Abstract

Soft lithography and self-assembly provide powerful means of organizing colloidal solution of synthesized nanoparticles (NPs) for a wide variety of application. Pattern transfer of silicon dioxide (SiO 2 ) nanoparticles–polymethylmethacylate (PMMA) nanocomposite was investigated ...

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