Hybrid Simulation Approach on MEMS Piezoresistive Microcantilever Sensor for Biosensing Applications (original) (raw)
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Simulation and design of piezoelectric microcantilever chemical sensors
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This paper presents an analytical modeling of a piezoelectric multi-layer cantilever used as a micro-electro-mechanical-system (MEMS) chemical sensor. Selectively coated microcantilevers have been developed for highly sensitive chemical sensor applications. The proposed piezoelectric chemical sensor consists of an array of multi-layer piezoelectric cantilevers with voltage output in the millivolt range that replaces the conventional laser-based position-sensitive detection systems. The sensing principle is based upon changes in the deflection induced by environmental factors in the medium where a microcantilever is immersed. Bending of the cantilever induces the potential difference on opposite sides of the piezoelectric layer providing an information signal about the detected chemicals. To obtain an application specific optimum design parameters and predict the cantilever performance ahead of actual fabrication, finite element analysis (FEM) simulations using CoventorWare (a MEMS design and simulation program) were performed. Analytical models of multi-layer cantilevers as well as simulation concept are described. Both mechanical and piezoelectric simulation results are carried out. The cantilever structures are analyzed and fabrication process steps are proposed.
ISSS Journal of Micro and Smart Systems, 2017
Microcantilevers are extensively used in Micro Electro Mechanical Systems for a variety of sensing applications. This study presents the modeling, design and simulation of piezoresistive microcantilevers with an embedded heater based on Multi User MEMS Process. Simulations were carried out for the heater, microcantilever and the piezoresistor using a commercially available Finite Element Solver. Electro-thermal analysis of the embedded heater showed [75% temperature uniformity on the microcantilever surface. It was observed that the deflection of the microcantilever tend to become nonlinear with load at elevated temperatures. Piezoresistive simulation showed an increase in sensitivity (DI/I), with displacement magnitude of the microcantilever. Fabricated microcantilevers showed that the piezoresistor stayed nearly at ambient temperature up to 5 V heater bias.
Measurement and Simulation Techniques For Piezoresistive Microcantilever Biosensor Applications
TELKOMNIKA Indonesian Journal of Electrical Engineering, 2012
Aplikasi mikrokantilever sebagai biosensor mulai banyak digunakan dalam dunia kesehatan, biologi, kimia dan lingkungan. Riset ini akan membahas perancangan teknik pengukuran dan simulasi aplikasi piezoresistive mikrokantilever sebagai biosensor, meliputi pembuatan rangkaian Wheatstone bridge sebagai detektor obyek, simulasi perubahan frekuensi resonansi berbasis Persamaan Euler-Bernoulli Beam sebagai deteksi keberadaan obyek, dan simulasi gerak mikrokantilever dengan menggunakan program software COMSOL Multiphysics 3.5. Tipe piezoresistive mikrokantilever yang digunakan adalah produk Seiko Instrument Technology (Jepang) dengan panjang 110 µm, lebar 50 µm, dan tebal 1 µm. Massa dari mikrokantilever 12.815 ng. Contoh obyek yang dideteksi adalah bakteri EColi, dimana massa untuk satu bakteri diasumsikan 0,3 pg. Hasil simulasi pada saat pendeteksian terjadi, untuk satu massa obyek bakteri akan menyebabkan nilai defleksi sebesar 0,03053 nm dan nilai frekuensi resonansi sebesar 118,90 kHz. Sedangkan untuk empat obyek bakteri akan menyebabkan nilai defleksi sebesar 0,03054 nm dan nilai frekuensi resonansi sebesar 118,68 kHz. Dari data tersebut terlihat bahwa bertambahnya massa bakteri akan menyebabkan naiknya nilai defleksi dan turunnya nilai frekuensi resonansi.
Sains Malaysiana, 2011
In principle, adsorption of biological molecules on a functionalized surface of a microfabricated cantilever will cause a surface stress and consequently the cantilever bending. In this work, four different type of polysilicon-based piezoresistive microcantilever sensors were designed to increase the sensitivity of the microcantilevers sensor because the forces involved is very small. The design and optimization was performed by using finite element analysis to maximize the relative resistance changes of the piezoresistors as a function of the cantilever vertical displacements. The resistivity of the piezoresistivity microcantilevers was analyzed before and after dicing process. The maximum resistance changes were systematically investigated by varying the piezoresistor length. The results show that although the thickness of piezoresistor was the same at 0.5 μm the resistance value was varied.
This paper reports on the development of a piezoresistive microcantilever sensor read-out circuitry to detect acceleration, biological or chemical activities. Laser micromachining technique is used in fabricating the piezoresistive microcantilever sensor as well as assisting in the cantilever beam and piezoresistor shape formation. In order to test the sensor performance, a Wheatstone bridge which acts as resistive sensor is integrated with three other resistors and the fabricated sensor. A set of amplifier circuit consisting of INA128 is developed to amplify and extract the electrical signal component of the bridge circuit. The resistance and output voltage characteristic of the Wheatstone bridge is investigated, where the percentages difference between the calculated and measured output voltage is very low and similar to each other. The sensor response to vibration is also studied using an electro-dynamic vibration system. The system is designed specifically to enable the accessibility of a small resistivity change due to outside reaction.
The measurement of glucose is of great importance in clinical diagnosis. This is especially essential for the continuous monitoring for example in a patient suffering from diabetes mellitus which is caused by the high levels of glucose in human physiological fluid. Even though many research have been done for glucose measurement, there are still many research in progress to develop new methods and technologies for sampling, detecting and monitoring glucose levels. This work has focused on the design simulation analysis of a Polysilicon-based CMOS micromachined Piezoresistive Microcantilever beam for glucose sensing application. In principle, adsorption of glucose on a functionalized surface of the microfabricated cantilever will cause a surface stress and consequently the cantilever bending. In this paper, the microcantilever beam is constructed and bending analysis is performed so that the beam tip deflection could be predicted. The device model was simulated using CoventorWare TM ...
Fabrication of piezoresistive microcantilever using surface micromachining technique for biosensors
2005
A microcantilever-based biosensor with piezoresistor has been fabricated using surface micromachining technique, which is cost effective and simplifies a fabrication procedure. In order to evaluate the characteristics of the cantilever, the cystamine terminated with thiol was covalently immobilized on the gold-coated side of the cantilever and glutaraldehyde that would be bonded with amine group in the cystamine was injected subsequently. This process was characterized by measuring the deflection of the cantilever in real time monitoring. Using a piezoresistive read-out and a well-known optical beam deflection method as well, the measurement of deflection was carried out. The sensitivity of piezoresistive method is good enough compared with that of optical beam deflection method.
MEMS Microcantilevers : The Coming Generation Sensing Elements
2018
MEMS is the integration of active and passive elements on a single chip, which combine electronics, electrical as well as mechanical elements to use in sensing and actuation. MEMS technology used the Microcantilevers as basic sensing elements. Microcantilevers are used to sense physical, chemical, biomedical and many other properties. In this paper different approaches are used to increase the sensitivity of sensors. Comparative analysis of simulated results of different microcantilevers is shown. Analytical approaches are also used to validate the design of microcantilevers. Keywords— MEMS, Microcantilevers, Actuation, Sensing. __________________________________________________*****_________________________________________________
Preparation of Piezoresistive Microcantilever for Biosensor Application
Microcantilever chip fabricated by Micro-Electro-Mechanical System (MEMS) technology was proved to develop as a biosensor device. This chip contains four microfabricated beams of cantilever with gold-coated surface and embedding polysilicon wire. Polysilcon wire acts as a piezoresistor which resistance change indicates microcantilever deflection. Relationship between original resistance and microcantilever deflection shows the detection range of this device within 0-1.1 kΩ. The examination of microcantilever response to avidin immobilization demonstrated that resistance change inducing by avidin absorption could be detected and reaches to level of amount independence at avidin concentration higher 80 µg/ml. The results indicated the possibility to develop this device as a piezoresistive-based biosensor.