Analysis of Aluminium Ion Implantation Damage into 6H-SiC Epilayers (original) (raw)

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Analysis of Aluminium Ion Implantation Damage into 6H-SiC Epilayers

Materials Science Forum, 1998

G. LulliG. Lulli

Abstract

Materials Science Forum Vols. 264-268 (1998) pp 733-736 Online available since 1998/Feb/01 at www.scientific.net © (1998) Trans Tech Publications, Switzerland doi:10.4028/www.scientific.net/MSF.264-268.733 ... All rights reserved. No part of ...

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