Strain and composition distribution in uncapped SiGe islands from x-ray diffraction (original) (raw)

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Strain and composition distribution in uncapped SiGe islands from x-ray diffraction

Applied Physics …, 2001

ADENIYI DANIELAdeniyi Daniel

Abstract

... Repeating the procedure while varying the Ge distribution and the island shape until a good correspondence between experiment and simulation is reached, we are able to establish the distributions of Ge content and strain within the islands. ...

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