Magnetic, electrical and structural properties of granular [FeCOB/(SiO2)]× n thin films (original) (raw)

Journal of Optoelectronics and Advanced Materials, 2004

Abstract

The granular metal - insulator films are composite materials consisting of metallic nanograins embedded in an insulating matrix. The ferromagnetic metal - insulator thin films with very high electrical resistivity are an excelent candidate for high permeability cores in thin film inductors which operate at high frequencies. A source of losses are eddy currents in the magnetic layers. A possible way to reduce these losses is to fabricate the magnetic/dielectric multilayers. This paper reports some results concerning the influence of the FeCoB and SiO 2 layers composition and annealing temperature on the resistive, magnetic and microstructural properties of [FeCoB/(SiO 2 )]×n multilayer thin films. As compared to the well known FeCoB alloys, widely used in the electromagnetic micro-devices which can operate at high frequencies, the [FeCoB/(SiO 2 )]×n (n ≥ 30) thin films exhibit high resistivity over 8 x 10 - 3 mΩ.m while superior soft magnetic properties specific for FeCoB thin films ...

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