P4M-3 Experimental Characterization of Capacitive Micromachined Ultrasonic Transducers (original) (raw)

New fabrication process for capacitive micromachined ultrasonic transducers

Sanli Ergun

2003

View PDFchevron_right

Atomic-Layer Deposition for Fabricating Capacitive Micromachined Ultrasonic Transducers: Initial Characterization (S & M 0702)

O Mukdadi

2008

View PDFchevron_right

Characterization of capacitive micromachined ultrasonic transducers

J. Lardies

2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2014

View PDFchevron_right

Fabricating capacitive micromachined ultrasonic transducers with wafer-bonding technology

Sanli Ergun, Butrus Khuri-Yakub

… Systems, Journal of, 2003

View PDFchevron_right

Advances in Capacitive Micromachined Ultrasonic Transducers

Butrus Khuri-Yakub

Micromachines, 2019

View PDFchevron_right

A new regime for operating capacitive micromachined ultrasonic transducers

Baris Bayram, Butrus Khuri-Yakub

Ultrasonics, …, 2003

View PDFchevron_right

Collapsed regime operation of capacitive micromachined ultrasonic transducers based on wafer-bonding technique

Ching-Hsiang Cheng

2003

View PDFchevron_right

The microfabrication of capacitive ultrasonic transducers

Butrus Khuri-Yakub

… Systems, Journal of, 1998

View PDFchevron_right

Operating point of Capacitive Micromachined Ultrasonic Transducers with Sub-structural Elements

Inga Vilkončienė

Electronics and Electrical Engineering, 2012

View PDFchevron_right

Fabrication of Capacitive Micromachined Ultrasonic Transducers via Local Oxidation and Direct Wafer Bonding

Sanli Ergun

Journal of Microelectromechanical Systems, 2000

View PDFchevron_right

Fabrication of capacitive ultrasonic transducers by a low temperature and fully surface-micromachined process

Alessandro Caronti

Precision Engineering, 2002

View PDFchevron_right

Highly integrated 2-D capacitive micromachined ultrasonic transducers

Ching-Hsiang Cheng

View PDFchevron_right

Surface micromachined capacitive ultrasonic transducers

Abdullah Atalar

IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 2000

View PDFchevron_right

Broadband capacitive micromachined ultrasonic transducers ranging from 10 kHz to 60 MHz for imaging arrays and more

Goksenin Yaralioglu

2002 IEEE Ultrasonics Symposium, 2002. Proceedings.

View PDFchevron_right

Capacitive micromachined ultrasonic transducers using commercial multi-user MUMPs process: capability and limitations

Clyde Oakley

Ultrasonics, 2009

View PDFchevron_right

Micromachined capacitive ultrasonic transducers fabricated using silicon on insulator wafers

Elena Cianci

Microelectronic Engineering, 2002

View PDFchevron_right

Comparison of conventional and collapsed region operation of capacitive micromachined ultrasonic transducers

Ching-Hsiang Cheng, Sanli Ergun, Butrus Khuri-Yakub

IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 2000

View PDFchevron_right

Dynamic analysis of capacitive micromachined ultrasonic transducers

Goksen Yaralioglu

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control, 2005

View PDFchevron_right

A solution to the charging problems in capacitive micromachined ultrasonic transducers

Sanli Ergun

IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 2000

View PDFchevron_right

Capacitive micromachined ultrasonic transducer technology for medical ultrasound imaging

Butrus Khuri-Yakub

Proceedings of SPIE, 2005

View PDFchevron_right

Fabrication of Capacitive Micromachined Ultrasonic Transducers (CMUTs) using wafer bonding technology for low frequency (10 kHz-150 kHz) sonar applications

Butrus Khuri-Yakub

2005

View PDFchevron_right

The characterization of capacitive micromachined ultrasonic transducers in air

Duncan Billson

Ultrasonics, 2002

View PDFchevron_right

6F-5 Characterization of Fabrication Related Gap-Height Variations in Capacitive Micromachined Ultrasonic Transducers

Serena Wong

2007

View PDFchevron_right