Dielectric Properties of Noncrystalline HfSiON (original) (raw)
Environment of hafnium and silicon in Hf-based dielectric films: An atomistic study by x-ray absorption spectroscopy and x-ray diffraction
Sergio R Teixeira
Applied Physics Letters, 2005
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Experimental investigation of the electrical properties of atomic layer deposited hafnium-rich silicate films on n-type silicon
Salvador Dueñas
Journal of Applied Physics, 2006
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Structure analysis of the system Hafnium/Silicon by means of X-ray photoelectron spectroscopy and X-ray photoelectron diffraction (XPD)
Marcelo Carazzolle
Materials Science in Semiconductor Processing, 2006
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Hafnium silicon oxide films prepared by atomic layer deposition
Kaupo Kukli
Materials Science and Engineering: B, 2004
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Ion beam studies of Hafnium based alternate high-k dielectric films deposited on silicon
Anand Pathak
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 2014
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Characterization of HfO2 and hafnium silicate films on SiO 2/Si
Alain Diebold
AIP Conference Proceedings, 2009
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Electrical and structural properties of hafnium silicate thin films
I. Mitrovic, Octavian Buiu
Microelectronics Reliability, 2007
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Electronic properties of ultrathin HfO[sub 2], Al[sub 2]O[sub 3], and Hf–Al–O dielectric films on Si(100) studied by quantitative analysis of reflection electron energy loss spectra
Suhk Oh
Journal of Applied Physics, 2006
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Tuning the dielectric properties of hafnium silicate films
Theodor Doll
Microelectronic Engineering, 2007
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Characterization of hafnium oxide grown on silicon by atomic layer deposition: Interface structure
Christos Takoudis
Microelectronic Engineering, 2006
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Low-Temperature Deposition of Hafnium Silicate Gate Dielectrics
M. El Bouanani
IEEE Journal of Selected Topics in Quantum Electronics, 2004
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Investigation of lanthanum and hafnium-based dielectric films by X-ray reflectivity, spectroscopic ellipsometry and X-ray photoelectron spectroscopy
Christophe Cardinaud
Thin Solid Films, 2008
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Atomic layer deposition of thin hafnium oxide films using a carbon free precursor
John Conley
2003
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Characterization of Ultra-Thin Hafnium Oxide Films Grown on Silicon by Atomic Layer Deposition Using Tetrakis(ethylmethyl-amino) Hafnium and Water Precursors
N. Moumen
Chemistry of Materials, 2007
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Relationships among equivalent oxide thickness, nanochemistry, and nanostructure in atomic layer chemical-vapor-deposited Hf–O films on Si
Sandwip Dey
Journal of Applied Physics, 2004
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Hf1-xSixOy dielectric films deposited by UV-photo-induced chemical vapour deposition (UV-CVD)
Ian Boyd
2007
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Application of non-linear optical second harmonic generation and X-ray absorption and spectroscopies to defect related properties of Hf silicate and Hf Si oxynitride gate dielectrics
Dennis Nordlund
Microelectronic Engineering, 2009
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Thermal behavior of hafnium-based ultrathin films on silicon
gabriel soares
Journal of Vacuum Science & Technology A, 2003
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Deposition and electrical characterization of hafnium oxide films on silicon
Dimitrios Kouvatsos
physica status solidi (c), 2008
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Hydrogen and deuterium incorporation and transport in hafnium-based dielectric films on silicon
gabriel soares
2004
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Sub-bandgap defect states in polycrystalline hafnium oxide and their suppression by admixture of silicon
N. Nguyen, Albert Davydov
Applied Physics Letters, 2005
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Ultrathin HfO2 films grown on silicon by atomic layer deposition for advanced gate dielectrics applications
M. Gribelyuk
Microelectronic Engineering, 2003
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Composition dependence of electronic structure and optical properties of Hf[sub 1−x]Si[sub x]O[sub y] gate dielectrics
Ian Boyd
Journal of Applied Physics, 2008
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Impact of layer thickness on the ferroelectric behaviour of silicon doped hafnium oxide thin films
Thomas Mikolajick
Thin Solid Films, 2013
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Photoelectron spectroscopy (XPS) and photoelectron diffraction (XPD) studies on the system hafnium silicide and hafnium oxide on Si(100)
Marcelo Carazzolle
Materials Science in Semiconductor Processing, 2006
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An interfacial investigation of high-dielectric constant material hafnium oxide on Si substrate
pt liu
Thin Solid Films, 2005
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Growth and characterization of hafnium silicate films prepared by UV/ozone oxidation
Bruce Gnade
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 2004
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Photoelectron diffraction study and structure determination of ultrathin hafnium silicide layers on silicon(100) using Mg Kα radiation and synchrotron light
G. Kleiman
Journal of Electron Spectroscopy and Related Phenomena, 2007
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