Use of a nanostructured surface coating to achieve higher sputter rates (original) (raw)
Materials Letters, 2016
Abstract
A method is presented which leads to a higher sputter rate as compared to the sputtering of the surface of a bulk sample under the same sputtering conditions: the target is coated beforehand by a separate process to produce a nanostructured film on its surface. In the case of silver, the sputter yield under ion bombardment is 1.7 times higher. If the ions for the bombardment are generated by a voltage applied to the sample, then improvements up to a factor of five can be realized.
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