High-precision measurements of the groove density of diffraction gratings (original) (raw)

High-precision measurements of the groove density of diffraction gratings

SPIE Proceedings, 2000

Abstract

abstract The diffraction gratings are widely used to monochromatize and even focus the soft X-ray radiation produced by the high brilliance third generation synchrotron radiation sources. Nevertheless, the final performance of an instrument that uses a diffraction ...

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