Properties of BaTiO3 thin films deposited by radiofrequency beam discharge assisted pulsed laser deposition (original) (raw)

Materials Science and Engineering: B, 2004

Abstract

BaTiO3 (Barium titanate, BTO) thin films were grown on Pt coated Si substrates by radiofrequency discharge assisted pulsed laser deposition (RF-PLD). A standard experimental set-up consisting in a pulsed YAG-Nd laser working at wavelength of 355nm and incident fluence in the range of 2–3J/cm2 and assisted by a radio frequency plasma discharge (power RF of about 50–200W in a O2

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