White light interferometry for vertical artifact calibration (original) (raw)

2008

Abstract

In this paper we describe a traceable to the meter standard method to measure the height of an artifact used as a calibrator for observation instruments in nanotechnologies and nanosciences. The artifact is a grating specially manufactured so that its features (height, pitch, width, wall angles) are highly uniform across its area. A Linnik microscope designed for longitudinal (vertical) measurements

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