Carbon nanotubes as field emission sources (original) (raw)

We review the PECVD growth process, and the microfabrication techniques needed to produce well defined carbon nanotube based micro-electron sources for use in novel parallel e-beam lithography and high frequency microwave amplifier systems. = Author indexing requirements 1. Author indexing will be facilitated if one forename (preferably the first) for each author is spelled out in full in the heading to this paper. 2. The index term for each author will normally be the last word in his or her name. If you wish any of the authors of this paper to be treated differently, please indicate that part of the name to be used as the index term.