Interferometric, absolute sensor of angular micro-displacement (original) (raw)

Precision Engineering-journal of The International Societies for Precision Engineering and Nanotechnology, 2021

Abstract

A design of a new, absolute sensor for measurement of an angular micro-displacement is presented. In this sensor deflections of incident laser beam generate changes of the constant of the interference fringes that are created by the double arm special interferometer. Fringe constant is determined using a CCD camera and proposed analysis algorithms. Sensor’s operating principle and metrological properties are presented. Sensor was tested using reference interferometer. Obtained measurement uncertainty is equal to ±10 μrad in the multi-milliradian range. The concept of a two-sensor system for increasing twice the measuring range is presented.

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