Spectroellipsometric characterization of Au-Y2O3–stabilized ZrO2 nanocomposite films (original) (raw)

2005, Journal of Materials Research

Nanocomposite thin films consisting of Au nanoparticles embedded in yttria-stabilized zirconia (YSZ) were synthesized at room temperature by radio frequency magnetron co-sputtering from YSZ and Au targets and subsequently annealed in an argon atmosphere. Au microstructure and particle size were characterized as a function of annealing temperature from 600 to 1000 °C by x-ray diffraction, transmission electron microscopy, scanning electron microscopy, and Rutherford backscattering spectroscopy. Spectroscopic ellipsometry was also used to determine the optical constants of the resulting films. In particular, the refractive index of the nanocomposites was found to undergo an anomalous dispersion in the spectral region where the extinction coefficient achieves its maximum. Additionally, the incorporation of Au in the YSZ matrix was found to increase the refractive index in comparison to that of YSZ. At annealing temperatures higher than 800 °C, a good agreement was found between experim...

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