Design and fabrication of IDT saw by using conventional lithography technique (original) (raw)

The Surface Acoustic Wave (SAW) devices, using interdigital electrodes, play a key role in today's telecommunication systems and are widelyused as electronic filters, resonators, delay lines, convolvers or wireless identification systems (ID tags). The geometry of the device play greater role in determing its optimum performance. Hence.The purpose of this study is to investigate the behavior of fingers various for surface acoustic waveinterdigital transduction which could be subsequently used in biosensor application. Two groups of miniature SAW biosensor IDT fingers are successfully designed and fabricated using conventional lithography method. The combination of ZnO as a piezoelectric substrate and aluminium as an IDT show a good result in term of electrical characterization and frequency response. From the result, shows that increasing number of SAW IDT has higher 2.40 MHz center frequency and hence can improve the sensitivity. It shows that these designs are suitable to apply in the SAW biosensor application.

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