The Discharge Pressure and Longitudinal Magnetic Field Dependence of Plasma Parameters via Optical Emission Spectroscopy at the Magnetron Sputtering System (original) (raw)
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This paper investigates the characteristics some of argon plasma parameters of glow discharge under axial magnetic field. The DC power supply of range (0-6000) V is used as a breakdown voltage to obtain the discharge of argon gas. The discharge voltage-current (V-I) characteristic curves and Paschen’s curves as well as the electrical conductivity were studied with the presents of magnetic field confinement at different gas pressures. The magnetic field up to 25 mT was obtained using four coils of radius 6 cm and 320 turn by passing A.C current up to 5 Amperes. Spectroscopic measurements are employed for purpose of estimating two main plasma parameters electron temperature (Te) and electron density (ne). Emission spectra from positive column (PC) zone of the discharge have been studies at different values of magnetic field and pressures at constant discharge currents of 1.5 mA. Electron temperature (Te) and its density are calculated from the ratio of the intensity of two emission li...
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