OBIRCH Driven Failure Analysis for Process Development of 120 nm to 65 nm Technology Nodes (original) (raw)

2004

Abstract

Mr. Ryan Ross 1, Marc De la Bardonnie 2, Magali Lamy 3, Khiem Ly 1, Frederic Lorut 3, Christophe Wyon 4 and Laurens Kwakman 2, 1 Freescale Semiconductor, 870, Rue Jean Monnet, Crolles, 38926, France, 2 Philips Semiconductors, 860, Rue Jean Monnet, ...

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