Development of a Miniaturized Liquid Core Waveguide System With Nanoporous Dielectric Cladding—A Potential Biosensing Platform (original) (raw)
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IEEE Sensors Journal, 2009
We present a high-throughput optofluidic light waveguide system consisting of etched microchannels in silicon using water as the core and an ultra low refractive index nanoporous dielectric (ND) as the cladding Organosilicate nanoparticulate films with refractive index of 1.16 have been used as the cladding layer. Although NDs offers many advantages over Teflon AF for use as the cladding layer, integration of these coatings to the waveguide design is not trivial. In this paper, we address the various integration issues of the NDs to the liquid core waveguide architecture followed by testing of these waveguides for their light guiding capability. Compared to uncoated channels, ND clad channels offer a high light guiding efficiency. In addition, the high surface areas associated with them could be potentially used to immobilize higher density of sensor probes implying a great potential for biosensor applications in an integrated system.
A Novel Air/Nanoporous Dielectric Clad Optofluidic Waveguide System for Sensor Applications
We report a novel high throughput liquid core waveguide system (LCW) featuring water as the core and air/nanoporous dielectric as cladding and demonstrate that such miniaturized devices have a great potential as sensor platforms, particularly biosensors. Organosilicate nanoparticulate films with refractive indices as low as 1.04 have been used as the cladding material. Apart from successful integration of these coatings, we present a simplified fabrication process eliminating the need for etched microchannels. ...
Liquid Core ARROW Waveguides: A Promising Photonic Structure for Integrated Optofluidic Microsensors
Micromachines, 2016
In this paper, we introduce a liquid core antiresonant reflecting optical waveguide (ARROW) as a novel optofluidic device that can be used to create innovative and highly functional microsensors. Liquid core ARROWs, with their dual ability to guide the light and the fluids in the same microchannel, have shown great potential as an optofluidic tool for quantitative spectroscopic analysis. ARROWs feature a planar architecture and, hence, are particularly attractive for chip scale integrated system. Step by step, several improvements have been made in recent years towards the implementation of these waveguides in a complete on-chip system for highly-sensitive detection down to the single molecule level. We review applications of liquid ARROWs for fluids sensing and discuss recent results and trends in the developments and applications of liquid ARROW in biomedical and biochemical research. The results outlined show that the strong light matter interaction occurring in the optofluidic channel of an ARROW and the versatility offered by the fabrication methods makes these waveguides a very promising building block for optofluidic sensor development.
Optofluidic Waveguides in Teflon AF-Coated PDMS Microfluidic Channels
IEEE Photonics Technology Letters, 2009
We report a new method for fabricating an optofluidic waveguide that is compatible with polydimethylsiloxane (PDMS). The light path follows the microfluidic channels, an architecture that can maximize detection efficiency and make the most economic use of chip area in many labon-chip applications. The PDMS-based microfluidic channels are coated with Teflon amorphous fluoropolymers (Teflon AF) which has a lower refractive index (n = 1.31) than water (n = 1.33) to form a water/Teflon AF optical waveguide. Driven by a vacuum pump, the Teflon AF solution was flowed through the channels, leaving a thin (5-15 µm) layer of coating on the channel wall as the cladding layer of optical waveguides. This coating process resolves the limitations of spincoating processes by reducing the elasticity mismatch between the Teflon AF cladding layer and the PDMS device body. We demonstrate that the resulting optofluidic waveguide confines and guides the laser light through the liquid core channel. Furthermore, the light in such a waveguide can be split when the fluid flow is split. This new method enables highly integrated biosensors such as lab-on-chip flow cytometers and micro-fabricated fluorescence-activated cell sorter with on-chip excitation.
Microfluidics and Nanofluidics, 2011
This article reports on a detailed investigation of sol-gel processed hybrid organic-inorganic materials for use in lab-on-a-chip (LoC) applications. A particular focus on this research was the implementation of integrated microfluidic circuitry in waveguide-based photonic sensing platforms. This objective is not possible using other fabrication technologies that are typically used for microfluidic platforms. Significant results on the surface characterisation of hybrid sol-gel processed materials have been obtained which highlight the ability to tune the hydrophilicity of the materials by careful adjustment of material constituents and processing conditions. A proof-of-principle microfluidic platform was designed and a fabrication process was established which addressed requirements for refractive index tuning (essential for waveguiding), bonding of a transparent cover layer to the device, optimized sol-gel deposition process, and a photolithography process to form the microchannels. Characterisation of fluid flow in the resulting microchannels revealed volumetric flow rates between 0.012 and 0.018 ll/min which is characteristic of capillary-driven fluid flow. As proof of the integration of optical and microfluidic functionality, a microchannel was fabricated crossing an optical waveguide which demonstrated that the presence of optical waveguides does not significantly disrupt capillary-driven fluid flow. These results represent the first comprehensive evaluation of photocurable hybrid sol-gel materials for use in waveguide-based photonic platforms for lab-on-a-chip applications.
A compact optofluidic cytometer with integrated liquid-core/PDMS-cladding waveguides
2012
We developed a simple method to construct liquid-core/PDMS-cladding optical waveguides through pressurized filling of dead-ended micro-channels with optical fluids. The waveguides are in the same layer as microfluidic channels which greatly simplifies device fabrication. With proper contrast between the refractive index of the core and cladding, the transmission loss of the waveguides is less than 5 dB/cm.
Microfabrication and characterization of teflon AF-coated liquid core waveguide channels in silicon
IEEE Sensors Journal, 2003
The fabrication and testing of Teflon AF-coated channels on silicon and bonding of the same to a similarly coated glass wafer are described. With water or aqueous solutions in such channels, the channels exhibit much better light conduction ability than similar uncoated channels. Although the loss is greater than extruded Teflon AF tubes, light throughput is far superior to channels described in the literature consisting of [110] planes in silicon with 45 sidewalls. Absorbance noise levels under actual flow conditions using an LED source, an inexpensive photodiode and a simple operational amplifier circuitry was 1 10 4 absorbance units over a 10-mm path length (channel 0.17-mm deep 0.49-mm wide), comparable to many commercially available macroscale flow-through absorbance detectors. Adherence to Beer's law was tested over a 50-fold concentration range of an injected dye, with the linear 2 relating the concentration to the observed absorbance being 0.9993. Fluorescence detection was tested with fluorescein as the test solute, a high brightness blue LED as the excitation source and an inexpensive miniature PMT. The concentration detection limit was 3 10 9 M and the corresponding mass detection limit was estimated to be 5 10 16 mol.
Applied Optics, 2006
The fabrication of embedded microchannels monolithically integrated with optical waveguides by plasma-enhanced chemical vapor deposition of doped silica glass is reported. Both waveguide ridges and template ridges for microchannel formation are patterned in a single photolithography step. The microchannels are formed within an overlay of borophosphosilicate glass (BPSG), which also serves as the top cladding layer of the silica waveguides. No top sealing of the channels is required. Surface accessible fluid input ports are formed in a BPSG layer, with no additional steps, by appropriate design of template layers. By tightly controlling the refractive index of the waveguide layer and the microchannel-forming layer, fully integrated structures facilitating optical coupling between solid waveguides and liquids segments in various geometries are demonstrated. Applications in liquid-filled photonic device elements for novel nonlinear optical devices and in optical sensors and on-chip spectroscopy are outlined.
Refractive Index Sensor Based on a 1D Photonic Crystal in a Microfluidic Channel
Sensors, 2010
A refractive index sensor has been fabricated in silicon oxynitride by standard UV lithography and dry etching processes. The refractive index sensor consists of a 1D photonic crystal (PhC) embedded in a microfluidic channel addressed by fiber-terminated planar waveguides. Experimental demonstrations performed with several ethanol solutions ranging from a purity of 96.00% (n = 1.36356) to 95.04% (n = 1.36377) yielded a sensitivity (Δ Δ /Δ n) of 836 nm/RIU and a limit of detection (LOD) of 6 × 10 -5 RIU, which is, however, still one order of magnitude higher than the theoretical lower limit of the limit of detection 1.3 × 10 -6 RIU.
Optofluidic waveguides: I. Concepts and implementations
Microfluidics and Nanofluidics, 2007
We review recent developments and current status of liquid-core optical waveguides in optofluidics with emphasis on suitability for creating fully planar optofluidic labs-on-a-chip. In this first of two contributions, we give an overview of the different waveguide types that are being considered for effectively combining micro and nanofluidics with integrated optics. The large number of approaches is separated into conventional index-guided waveguides and more recent implementations using wave interference. The underlying principle for waveguiding and the current status are described for each type. We then focus on reviewing recent work on microfabricated liquid-core antiresonant reflecting optical (ARROW) waveguides, including the development of intersecting 2D waveguide networks and optical fluorescence and Raman detection with planar beam geometry. Single molecule detection capability and addition of electrical control for electrokinetic manipulation and analysis of single bioparticles are demonstrated. The demonstrated performance of liquid-core ARROWs is representative of the potential of integrated waveguides for on-chip detection with ultrahigh sensitivity, and points the way towards the next generation of high-performance, low-cost and portable biomedical instruments.