Synthesis and characteristics of Sn-doped SiO2 via plasma-enhanced atomic layer deposition for self-aligned patterning (original) (raw)
Structural properties of SiO2 films prepared by plasma-enhanced chemical vapor deposition
Giulio Ceriola
Materials Science in Semiconductor Processing, 2001
View PDFchevron_right
A soft Plasma Enhanced-Chemical Vapor Deposition process for the tailored synthesis of SiO2 films
Davide Barreca
Thin Solid Films, 2008
View PDFchevron_right
Structural properties of nanocomposite SiO2 (Si) films obtained by ion-plasma sputtering and thermal annealing
Anatoliy Evtukh
Semiconductor Physics Quantum Electronics and Optoelectronics, 2011
View PDFchevron_right
Thermal and plasma enhanced atomic layer deposition of SiO2 using commercial silicon precursors
Harri Lipsanen
Thin Solid Films, 2014
View PDFchevron_right
Influence of Si substrate preparation on surface chemistry and morphology of L-CVD SnO2 thin films studied by XPS and AFM
J. Szuber
Applied Surface Science, 2010
View PDFchevron_right
Atomic Layer Deposition of Epitaxial and Polycrystalline SnO2 Films from the SnI4/O2 Precursor Combination
Jonas Sundqvist
Chemical Vapor Deposition, 2003
View PDFchevron_right
Growth of SnO 2 thin films by atomic layer deposition and chemical vapour deposition: A comparative study
Jonas Sundqvist
Thin Solid Films, 2006
View PDFchevron_right
Growth mechanisms of SiO2 thin films prepared by plasma enhanced chemical vapour deposition
Francisco Yubero
Surface & Coatings Technology, 2005
View PDFchevron_right
Nanostructural and surface morphological evolution of chemically sprayed SnO2 thin films
Sajeeth Philip
Applied Surface Science, 2008
View PDFchevron_right
Formation and structure of Sn and Sb nanoclusters in thin SiO2 films
G. Ciatto, Sabina Spiga, F. D'Acapito
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 2003
View PDFchevron_right
Physical properties of plasma deposited SiOx thin films
German Rodriguez Diaz
Vacuum, 2002
View PDFchevron_right
Scaling behavior and mechanism of formation of SiO2 thin films grown by plasma-enhanced chemical vapor deposition
Agustin R. Gonzalez-Elipe
Physical Review B, 2007
View PDFchevron_right
SnO2 Nanocrystalline Thin Films by XPS
Davide Barreca
Surface Science Spectra, 2000
View PDFchevron_right
Characterizations of SnO 2 thin films deposited on Si substrates
Sai Wong
Thin Solid Films, 1998
View PDFchevron_right
Structural and surface microstructure evolutions in SnO thin films under ion irradiation
kd verma
View PDFchevron_right
First nucleation steps during deposition of SiO 2 thin films by plasma enhanced chemical vapour deposition
juan cotrino
Surface Science, 2007
View PDFchevron_right
The influence of post deposition plasma treatment on SnOx structural properties
N. Tomašić, S. Bernstorff, D. Gracin
Vacuum, 2007
View PDFchevron_right
Surface structure and composition of nanocrystalline SnO2 thin films obtained by Chemical Vapor Deposition
Davide Barreca
MRS Proceedings, 2004
View PDFchevron_right
Effects of deposition temperature on the structural and morphological properties of SnO2 films fabricated by pulsed laser deposition
Amit Pratap Singh
Optics and Laser Technology, 2009
View PDFchevron_right
Sn film deposition on silica glass substrates
Shunichi Hishita
Thin Solid Films, 2004
View PDFchevron_right
Bottom-up plasma-enhanced atomic layer deposition of SiO2 by utilizing growth inhibition using NH3 plasma pre-treatment for seamless gap-fill process
yoenju choi
View PDFchevron_right
Low temperature synthesis of dense SiO2 thin films by ion beam induced chemical vapor deposition
Francisco Yubero
Thin Solid Films, 2001
View PDFchevron_right
SnO 2 thin films prepared by ion beam induced CVD. Preparation and characterization
Francisco Yubero
Le Journal de Physique IV, 1999
View PDFchevron_right
Effect of Annealing Temperature and Oxygen Flow in the Properties of Ion Beam Sputtered SnO2—x Thin Films
Jui-Chao Kuo
Materials, 2015
View PDFchevron_right
Nanostructural characterisation of SnO2 thin films prepared by reactive r.f. magnetron sputtering of tin
Vincent Casey
Thin Solid Films, 2002
View PDFchevron_right
Influence of oxygen plasma treatment on the microstructure of SnO x thin films
Kun Lian
Thin Solid Films, 2002
View PDFchevron_right
Article Effect of Annealing Temperature and Oxygen Flow in the Properties of Ion Beam Sputtered SnO2´x Thin Films
Jui-Chao Kuo
2015
View PDFchevron_right
Microstructural, optical and electrical investigations of Sb-SnO2 thin films deposited by spray pyrolysis
Bhabani S Das
Materials Research Bulletin, 2013
View PDFchevron_right
Structural analysis of monolayered and bilayered SnO2 thin films
Iva Bogdanovic Radovic
Surface and Coatings Technology, 2012
View PDFchevron_right
Morphology tailored SnO2 thin films by spray gel process
Walter Estrada
2006
View PDFchevron_right
Control over Film Thickness of SnO2 Ultrathin Film Selectively Deposited on a Patterned Self-Assembled Monolayer
Yoshitake Masuda
Langmuir, 2002
View PDFchevron_right