A Fully Symmetric and Completly Decoupled MEMS-SOI Gyroscope (original) (raw)

Modal Analysis of a Single-Structure Multiaxis MEMS Gyroscope

Journal of Sensors, 2016

This paper reports on designing a single-structure triaxes MEMS capacitive gyroscope which is capable of measuring the three angular velocities on a single drive. A Z-shaped beam for the support of folded coupling spring has been applied to suppress the unwanted mode and decrease the stress effect at the spring ends. The unique coupling spring has changed the driving motion, due to which slide film damping in the driving mode has been reduced. This reduction can lead to higher performance of the sensor with less requirements on vacuum level which decreases the cost of fabrication. Simulation analysis has been performed in COMSOL Multiphysics and Matlab Simulink to finalize the design for fabrication. After finite element analysis, the driving, x-sensing, z-sensing, and y-sensing are, respectively, found to be 13.30 KHz, 13.40 KHz, 13.47 KHz, and 13.51 KHz.

Design and Analysis of a Single-Structure Three-Axis MEMS Gyroscope with Improved Coupling Spring

This paper reports the design and analysis of a single drive mass three axis Microelectromechanical systems (MEMS) gyroscope. The proposed MEMS gyroscope contains a unique and simple coupling spring to couple the driving masses. Due to the use of this coupling spring, the stress effect on the spring ends is reduced as it is attached at two points with the driving mass. Moreover, the unwanted motions of the driving mass can be suppressed due to the use of the two spring beams for the support of the central spring. After FEA simulation using COMSOL Multiphysics tool, a first driving mode of the proposed design has been achieved. Other modes were achieved for the pitch, roll and yaw sensing parts. The simulated resonant frequencies are 15.20 kHz for the driving mode, 15.21 kHz for the pitch sensing mode, 15.32 kHz for the roll sensing mode and 15.59 kHz for the yaw sensing mode, respectively.

Development and Research of the Sensitive Element of the MEMS Gyroscope Manufactured Using SOI Technology

Micromachines

In this article, based on the developed methodology, the stages of designing the sensitive element of a microelectromechanical gyroscope with an open-loop structure are considered. This structure is intended for use in control units for mobile objects such as robots, mobile trolleys, etc. To quickly obtain a ready-made gyroscope, a specialized integrated circuit (SW6111) was selected, for the use of which the electronic part of the sensitive element of the microelectromechanical gyroscope was developed. The mechanical structure was also taken from a simple design. The simulation of the mathematical model was carried out in the MATLAB/Simulink software environment. The mechanical elements and the entire structure were calculated using finite element modeling with ANSYS MultiPhysics CAD tools. The developed sensitive element of the micromechanical gyroscope was manufactured using bulk micromachining technology−silicon-on-insulator−with a structural layer thickness equal to 50 μm. Expe...

A novel dynamic pull-in MEMS gyroscope

Procedia Engineering, 2011

The present paper analyzes numerically and experimentally the dependence of the dynamic pull-in voltage amplitude on the values of externally-induced accelerations (eg Coriolis accelerations in the case of vibratory gyroscopes). We have investigated the nonlinear dynamic behavior on two different device types, a micro-gyroscope (A) and a micro-accelerometer (B), both fabricated in the SOI-MUMPs process (25μm thick structural layer). Experimental measurements on the MEMS structures have been performed using Polytec ...