Mechatronic Scanning System with Integrated Micro Electro Mechanical System Position Sensors (original) (raw)

Design of Scanning System for Mechanoscopic Analysis

DAAAM International Scientific Book, 2016

The work deals with hardware and software proposal of a system suitable for control and visualization of scanning process based on resistivity measurement. Three axis positioning system with conductive contact probe is utilized. The user application was created in MATLAB programming environment. Important part of the design represents the definition of requirements, choice of the appropriate tools, functions and structures needed for reliable realization. Proposed user application allows setting key parameters of the measurement, appropriate method of data acquisition as well as performing online 3D visualization of measured data. The functionality of the application is verified via measurement of a several selected samples. Results of these measurements are also presented.

Novel MEMS Piezoresistive Sensor Array Cell

2007

The future of analytical methods based on micro-fabricated cantilever sensors is critically sensitive to parallel processing: some because of the increased throughput required, but others, because of the complexity of the value to analyze. Parallel functioning needs arrays with cantilevers having two additional properties, simultaneously: to be addressable and to be independently actuated. Fulfilling these two requirements together, causes substantial increasing of complexity of both: layout and manufacturing technology. In present paper we demonstrate a novel design of MEMS-cell solving upper dilemma. The cell consists of four integrated cantilevers, having a single piezo-resistor each and different resonance frequencies. Samples of e-NOSE piezoresistive sensor using micro cantilevers on n-type, <100> Silicon, have been fabricated applying combined dry and wet etching techniques. The cantilever dimensions were chosen to provide approx. 1.5 kHz resonance frequency gap between any two neighbor sensors. The integrated bimorph actuator is common for all four of them, which fit very well a particular application. The behavior of the new cell was studied and its optimization according to both: manufacturing technology and application criteria was discussed.

Modeling of a piezoelectric micro-scanner

Micro-scanners have been widely used in many optical applications. The micro-scanner presented in this paper uses multimorph-type bending actuators to tilt a square plate mirror. This paper presents a complete analytical model of the piezoelectric micro-scanner. This theoretical model based on strength of material equations calculates the force generated by the multimorphs on the mirror, the profile of the structure and the angular deflection of the mirror. The proposed model, used to optimize the design of the piezoelectric silicon microscanner, is intended for further HDL integration, allowing in this way system level simulation and optimization.

Surface- and bulk- micromachined two-dimensional scanner driven by angular vertical comb actuators

Journal of Microelectromechanical Systems, 2005

In this paper, we present the design, fabrication, and measurements of a two-dimensional (2-D) optical scanner with electrostatic angular vertical comb (AVC) actuators. The scanner is realized by combining a foundry-based surface-micromachining process (Multi-User MEMS Processes-MUMPs) with a three-mask deep-reactive ion-etching (DRIE) postfabrication process. The surface-micromachining provides versatile mechanical design and electrical interconnect while the bulk micromachining offers high-aspect ratio structures leading to flat mirrors and high-force, large-displacement actuators. The scanner achieves dc mechanical scanning ranges of 6 2 (at 55 Vdc) and 4 1 (at 50 Vdc) for the inner and outer gimbals, respectively. The resonant frequencies are 315 and 144 Hz for the inner and the outer axes, respectively. The 1-mm-diameter mirror has a radius of curvature of over 50 cm. [1454] Index Terms-Angular vertical comb (AVC) actuators, confocal microscopy two-dimensional (2-D) scanner, electrostatic force actuators, laser beam steering, micromirror, optical coherence tomography (OCT), scanner. I. INTRODUCTION A DVANCES in optical microelectromechanical systems (MEMS) technology have made it possible to realize compact, batch-fabricated, and cost-effective optical scanning components. In recent years, electrostatically actuated one-dimensional (1-D) and two-dimensional (2-D) scanners have been widely used in applications such as optical telecommunication subsystems [1]-[4], barcode scanners [5], projection displays [6], and endoscopic microscopy [7]-[10], owing to their low power consumption, low cost, and ease of integration. The general requirements of scanners for these applications are Manuscript

Development of a Micro/Nano Probing System Using Double Elastic Mechanisms

Sensors, 2018

To meet the requirement of high precision measurement of coordinate measurement machine system, a compact microprobe has been designed for 3D measurement in this paper. Aiming to reduce the influences of signal coupling during the probing process, the probe has been designed by adopting two elastic mechanisms, in which the horizontal and vertical motions of the probe tip can be separated by differential signals of quadrant photodetectors in each elastic mechanism. A connecting rod has been designed to transfer the displacement of the probe tip in vertical direction from lower to upper elastic mechanisms. The sensitivity models in horizontal and vertical directions have been established, and the sensor sensitivity has been verified through experiments. Furthermore, the signal coupling of three axes has been analyzed, and mathematical models have been proposed for decoupling. The probing performance has been verified experimentally.

Minimizing the Development Steps of Piezoresistive Microcantilever Using MEMS Micromachining

The conventional photolithography of crystalline silicon techniques is limited to two-dimensional and structure scaling. It is also requiring a lot of time and chemical involves for the whole process. These problems can be overcome by using laser micromachining, which a technique capable of producing three-dimensional (3D) structure and simultaneously avoiding the needs for photomasks. This paper reported the use of RapidX-250 excimer laser micromachine with 248 nm KrF to create in-time mask design and assisting ifabrication of piezoresistive microcantilever structures.Laser micromachining parameters is investigated in order to fabricate the microcantilever, which can be used in multiple applications including acceleration, vibration, bio/chemical detections and also in energy harvesting. Preliminary result shows that the fabricated sensor able to define the differences force and acceleration given regarding the unique electrical characteristic on fabricated piezoresistor.

Performance of a biaxial MEMS-based scanner for microdisplay applications

2000

Scanned displays have potential for achieving high brightness and see-through configurations in many display applications. A MEMS- based solution based on these tradeoffs for SVGA level performance is presented, with test data illustrating optical, mechanical, and electrical performance. Comparison of this scanner against video requirements and other scanners previously reported are illustrated. The feasibility of MEMS-based scanners for Retinal Scanning Displays and other applications is discussed, with extension to higher video performance standards.

3-D Complex Structural Modifications to Obtain Utmost Sensitivity Using MEMS Technology

Advanced Science Letters, 2020

Engineering Science playing a vital role in the medical field in this present scenario. In this paper using MEMS Technology modeling, design and analysis of the array of the micro cantilever have been done. Since a model should be simple to design, less power consumption, easy to model, cost-effective and efficient. So, micro cantilevers are the best platform to consider for such problems because it can be used as a very sensitive element in different fields. To make the device more efficient to improve the sensitivity instead of micro cantilever here an array of micro cantilever has been modeled. Since displacement should be high as the output of the device, hence different kinds of analysis have been done like 9 different kinds of materials have been used and analyzed for better sensitivity and it has been observed that SiO 2 is the best choice to get maximum displacement. Apart from those different geometrical shapes have been constructed and analyzed for better sensitivity in terms of maximum displacement. Few facts came out during the analysis process like how to make micro cantilever arrays simple and cost-effective instead of using 3 micro cantilevers as arrays we may use 2 micro cantilevers as an array with the same efficiency by altering the forces on surfaces of micro cantilever arrays. Reduction on effective areas from the fixed end side by using different geometrical differences can give better sensitivity and maximum displacement. This investigation report might be useful to use micro cantilever as a biosensor to detect different diseases.