Application of imprint technologies for creation of micro- and nanoscale pattern (original) (raw)

Application of imprint technologies for creation of micro- and nanoscale pattern

SPIE Proceedings, 2004

Abstract

Nanoimprinting is a low cost method to fabricate features from mum down to the nm-range. Different nanofabrication techniques, namely hot embossing, UV-nanoimprinting as well as micro-contact printing will be discussed. Recently achieved results with nanoimprinting methods will be demonstrated.

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