Application of a focused ion beam to prepare electron microscopy samples of surface nanostructures (original) (raw)

Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques, 2011

Abstract

ABSTRACT Carbon nanotubes grown on a silicon substrate with an array of FeNiCo20 catalyst islands are studied using focused ion beam and transmission electron microscopy. A method for preparing cross-sectional samples is proposed, which makes it possible to exclude the destructive effect of the ion beam on surface nanostructures during sample preparation using a microscopic three-dimensional protective barrier.

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