A novel expression obtained by using artificial bee colony algorithm to calculate pull-in voltage of fixed-fixed micro-actuators (original) (raw)
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— In this paper, a novel, computationally efficient, and simple closed-form expression has been derived to accurately calculate the pull-in voltage value of microelectromechanical system (MEMS) cantilever. At first, MEMSs actuators with various physical parameters have been simulated by a software that employs the finite element method, and then, the pull-in voltage expression has been derived by using the differential evolution optimization algorithm together with the simulation data. Since the formula is derived from the simulation data, it implicitly contains the fringing field effect. In order to verify the accuracy and robustness, the predictions of closed-form formula proposed in this paper have been compared with those of the theoretical ones through the simulation and experimental studies previously presented in the literature. The key advantage of the presented model is delivering a satisfying estimation of the pull-in voltage in a simple fashion. [2017-0245] Index Terms— Cantilever, differential evolution algorithm, electrostatic actuator, MEMS, pull-in voltage.
Analysis of nonlinear dynamic behavior and pull-in prediction of micro circular plate actuator
Journal of Vibroengineering, 2014
The dynamic behavior of micro circular plate electrostatic devices is not easily analyzed using traditional methods such as perturbation theory or Galerkin approach method due to the complexity of the interactions among the electrostatic coupling effect, the residual stress and the nonlinear electrostatic force. Accordingly, the present study proposes a approach for analyzing the dynamic response of such devices using a hybrid numerical scheme comprising the differential transformation method and the finite difference method. The feasibility of the proposed approach is demonstrated by modeling the dynamic response of a micro circular plate actuated by a DC voltage. The numerical results for the pull-in voltage are found to deviate by no more than 0.27 % from those derived in the literature using various computational methods. Thus, the basic validity of the hybrid numerical scheme is confirmed. Moreover, the effectiveness of a combined DC/AC loading scheme in driving the micro circu...
Comparative analysis of the planar capacitor and IDT piezoelectric thin-film micro-actuator models
Journal of Micromechanics and Microengineering, 2011
ABSTRACT A comparison of the analysis of similarly developed microactuators is presented. Accurate modeling and simulation techniques are vital for piezoelectrically actuated microactuators. Coupling analytical and numerical modeling techniques with variational design parameters, accurate performance predictions can be realized. Axi-symmetric two-dimensional and three-dimensional static deflection and harmonic models of a planar capacitor actuator are presented. Planar capacitor samples were modeled as unimorph diaphragms with sandwiched piezoelectric material. The harmonic frequencies were calculated numerically and compared well to predicted values and deformations. The finite element modeling reflects the impact of the d31 piezoelectric constant. Two-dimensional axi-symmetric models of circularly interdigitated piezoelectrically membranes are also presented. The models include the piezoelectric material and properties, the membrane materials and properties, and incorporates various design considerations of the model. These models also include the electro-mechanical coupling for piezoelectric actuation and highlight a novel approach to take advantage of the higher d33 piezoelectric coupling coefficient. Performance is evaluated for varying parameters such as electrode pitch, electrode width, and piezoelectric material thickness. The models also showed that several of the design parameters were naturally coupled. The static numerical models correlate well with the maximum static deflection of the experimental devices. Finally, this paper deals with the development of numerical harmonic models of piezoelectrically actuated planar capacitor and interdigitated diaphragms. The models were able to closely predict the first two harmonics, conservatively predict the third through sixth harmonics and predict the estimated values of center deflection using plate theory. Harmonic frequency and deflection simulations need further correlation by conducting extensive iterative harmonic simulations and experiments. The results, conclusions and potential improvements are discussed.
To appear, Journal of Micromechatronics VSP International Science Publishing 2002
Flapping wings provide unmatched maneuverability for flying micro-robots. Recent advances in modelling insect aerodynanamics show that adequate wing rotation at the end of the stroke is essential for generating adequate flight forces. A thorax structure has been developed utilizing planar 4-bar frames combined with a spherical 5-bar differential to provide adequate wing stroke and rotation. Calculations using a simple resonant mechanical circuit model show that piezoelectric actuators generate sufficient power, force ...