High resolution x-ray photoemission study of plasma oxidation of indium–tin–oxide thin film surfaces (original) (raw)

Journal of Applied Physics, 2000

Abstract

... V. Christou, M. Etchells, O. Renault, PJ Dobson, OV Salata, G. Beamson, RG Egdell. ... Plasma oxidation or chemical oxidation also reduces the level of carbon contamination on ITO surfaces (Table ), but as will emerge in the discussion below we believe that the removal of ...

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