Silicon-on-sapphire CMOS for improved VCSEL/CMOS optoelectronic interconnects (original) (raw)

LEOS 2000. 2000 IEEE Annual Meeting Conference Proceedings. 13th Annual Meeting. IEEE Lasers and Electro-Optics Society 2000 Annual Meeting (Cat. No.00CH37080)

Abstract

... unpolished. The unpolished side gave the sapphire a frosted appearance. ... This effectively smoothed out the roughness of the unpolished backside and made thesapphire substrate highly transparent to the VCSEL radiation. In ...

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