Some investigation results of the instability of humidity sensors based on alumina and porous silicon materials (original) (raw)

Sensors and Actuators B-chemical, 2000

Nguyen Tien

Abstract

The alumina and porous silicon humidity sensors (PS sensors) have been fabricated in the same structure by using the anodic technique. The sensitive films (ie, alumina and porous silicon) were formed on aluminium and silicon substrates by anodization [1]. In this report, the ...

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