Structural analysis of thin films of novel polynorbornene derivatives by grazing incidence X-ray scattering and specular X-ray reflectivity along with ellipsometry (original) (raw)

Characterization of polymer thin films with small‐angle X‐ray scattering under grazing incidence (GISAXS)

Synchrotron Radiation News, 2002

Polymer thin films have numerous technical applications as functional coatings, the most prominent example being PMMA coatings for lithography of integrated circuits and micromechanical devices. Polymer blends and block copolymers can be tailored for specific mechanical, optical, electric, and chemical properties. For instance, functional surfaces have been created by means of polymer blend and diblock copolymer films which may serve as templates for nanolithography or as antireflection coatings . In the rapidly developing field of molecular electronics, opto-electronical properties of polymer films have been exploited and first devices have appeared on the market [3].

Temperature studies of optical birefringence and X-ray diffraction with poly(p-xylylene), poly(chloro-p-xylylene) and poly(tetrafluoro-p-xylylene) CVD thin films

Polymer, 2000

The increased demand for low dielectric constant (k Ͻ 3:0) chemical vapor deposited polymer thin films to replace SiO 2 k 3:9-4:3 to reduce RC-delay in ultra large scale integration (ULSI) devices has prompted the synthesis of many new polymers. However, the ultimate properties of the polymer thin film are determined by its molecular structure that for polymers is often anisotropic. A basic understanding of the structure-property relations and how they are influenced by the molecular architecture is imperative for the future development of polymer thin films in a large number of applications including those in the electronics industry. The study here utilizes X-ray diffraction and variable angle spectroscopic ellipsometry to characterize the optical birefringence and its change as a function of successive post-deposition anneals with poly(p-xylylene), poly(chloro-p-xylylene), and poly(tetrafluoro-p-xylylene). b-PPXN and VT-4 are shown to have a large negative birefringence after a post-deposition anneal. However, PPXC and PPXD show the opposite behavior, exhibiting a small positive birefringence after anneal. Possible reasons for this difference are given. ᭧

Depth-resolved molecular structure and orientation of polymer thin films by synchrotron X-ray diffraction

European Polymer Journal, 2011

An exemplary system suitable for optoelectronics applications, i.e. poly(3-hexylthiophene), hereinafter P3HT, deposited by spin casting onto silicon substrates functionalised by three selected molecules and then properly annealed, has been examined. Grazing Incidence X-ray Scattering (GIXS) measurements have been performed with 4-circle diffractometer, allowing for a fine control of sample axes movement.

Spectroscopic ellipsometry study of N+ ion-implanted ethylene–norbornene films

Radiation Physics and Chemistry, 2014

Effect of N þ irradiation on optical properties of TOPAS 6017S-04 copolymer. Changes in index of refraction and dielectric function in N þ irradiated TOPAS. Optical energy gap and Urbach energy decrease with increasing ion fluence. Oscillator and dispersion energies decrease with increasing ion fluence to 10 15 cm À 2 .

Higher-order Structure Analysis of Polyethylene Thin Films by In-situ Synchrotron Grazing-incdence Small-angle and Wide-angle X-ray Scattering Measurements

Transactions of the Materials Research Society of Japan, 2007

The higher-order structures of high-density polyethylene (HDPE) thin films on Si wafers have been investigated on lamellar and molecular levels by synchrotron grazing-incidence small-angle and wide-angle X-ray scattering (GISW AXS: GISAXS and GIWAXS) measurements, respectively. Annealing effect on molecular orientation and lamellar stacking structure of the thin films was clarified by in-situ GISW AXS measurements at BL40B2 in SPring-8 for the thin films in a stepwise annealing process from 378 K to 393 K under vacuum. The thin films with a thickness of ea. 400 nm were prepared by a dip-coating method. The two-dimensional GISAXS patterns of the thin films suggested that crystalline lamellae were alternately stacked with amorphous in the parallel direction to the substrate surface and the long period increased from ea. 26 nm to ea. 36 nm during annealing. Their two-dimensional GIW AXS patterns measured at the same time indicated that HDPE chains formed the orthorhombic crystal and the chain axis in a crystalline lamella oriented relatively parallel to the film surface.

Energy dispersive x-ray reflectivity technique to study thermal properties of polymer films

Journal of Applied Physics, 2003

Thermal stability of epitaxial Mn5Ge3 and carbon-doped Mn5Ge3 films Appl. Phys. Lett. 99, 121904 (2011) Thermal variation of piezoresponse in microscopically poled poly(vinylidene fluoride-trifluoroethylene) ferroelectric copolymers approaching Curie temperature J. Appl. Phys. 110, 052008 Oxygen partial pressure effect on the thermal stability of Nd-123 superconductor thin films J. Appl. Phys. 110, 043916 A simple method to prepare self-assembled organic-organic heterobilayers on metal substrates AIP Advances 1, 022112 Thermal stability of amorphous GaN1xAsx alloys Appl. Phys. Lett. 98, 161902 (2011) Additional information on J. Appl. Phys.

Structural characterization of different insulating films by spectroscopic ellipsometry and grazing x‐ray reflectance

MRS Proceedings, 1996

Spectroscopic Ellipsometry (SE) and Grazing X-ray Reflectance (GXR) techniques are applied for different insulating films to determine precisely the thickness and optical indices of the layers. Antireflective coatings for microlithography in the DUV range are first analyzed. In the infrared range the layers are transparent and one can take into account the optical index of the layers by a simple dispersion law. Thicknesses obtained by this method are checked by the GXR technique. Extraction of the optical indices from UV to IR is made very accurately taking into account different SE measurements at various incident angles simultaneously. Amorphous carbon thin films are also analyzed in the same way. The main difference is that the layer is absorbant in the entire wavelength range. In this case, a first characterization by the GXR technique is essential to extract the thickness of the layer. Then the optical indices of the layer can be extracted very accurately by SE.

Electric-Field-Driven Alignment of Chiral Conductive Polymer Thin Films

Langmuir, 2014

We investigated the effect of an electric field on the alignment and structural properties of thin films of a chiral polybithiophene-based conductive polymer, functionalized with a protected L-cysteine amino acid. Thin films were obtained by exploiting both drop-casting and spin-coating procedures. The electric properties, the polarized Raman spectrum, the UV−vis spectrum, and the CD spectra were measured as a function of the electric field intensity applied during film formation. It was found that beyond the enhancement of the conductivity observed when the electric field aligns the polymer, the electric field significantly affects the chiral properties and the effect depends on the method of deposition.

Reflectance anisotropy spectroscopy of oriented films of semiconducting polymers

The Journal of Chemical Physics, 2000

We present reflectance anisotropy spectroscopy ͑RAS͒ data for aligned films of luminescent conjugated polymers. Ultrathin films ͑5-10 nm͒ spin-cast onto friction-deposited poly-tetrafluoroethylene ͑PTFE͒ show birefringence and dichroism indicating alignment of the polymer chains with the PTFE axis. The observed dichroism agrees very well with recently published polarized ultraviolet absorption spectra. In particular, the spectrum of a derivative of poly ͑para-phenylene͒ shows the onset of a perpendicular-polarized absorption feature at 5 eV, consistent with recent theoretical predictions. Thick films, prepared by gel-processing in polyethylene ͑PE͒, also show characteristic optical anisotropy, and the RAS results are interpreted in terms of the ellipsometric functions, ⌿ and ⌬.