Hybrid gas phase Ti-B-C-N coatings doped with Al (original) (raw)

Chemical-vapor deposition of wear resistant hard coatings in the Ti–B–C–N system: properties and metal-cutting tests

International Journal of Refractory Metals and Hard Materials, 2002

Cubic Ti(B x C y N z) (x þ y þ z ¼ 1) coatings were deposited on cemented carbides using chemical-vapor deposition (CVD). The Ti-B-C-N was maintained in the cubic phase by keeping the B content below 5%. The B:C:N ratio, microstructure, hardness and wear resistance of the coatings were controlled by varying the gas precursor flows in the CVD process. Results showed that TiCN coatings containing B exhibited higher hardness but lower critical loads (L c) for coating decohesion. Microprobe measurements revealed that B diffusion was responsible for inhomogeneous coating compositions and for the formations of a CoWB phase on the surface of the cemented carbide tool. Milling tests showed the coatings had good abrasion wear resistance. The dominant wear mechanism in turning tests was cratering.

Syntheses and mechanical properties of Ti–B–C–N coatings by a plasma-enhanced chemical vapor deposition

Surface and Coatings Technology, 2006

Quaternary Ti-B-C-N films were synthesized on AISI 304 and Si wafer by a PECVD technique using a gaseous mixture of TiCl 4 , BCl 3 , CH 4 , Ar, N 2 , and H 2 . The microstructure of Ti-B-C-N films was characterized by instrumental analyses of X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), and high-resolution transmission electron microscopy (HRTEM) in this work. Our Ti-B(9 at.%)-C-N coatings had a fine composite microstructure consisting of nano-sized Ti(C,N) crystallites surrounded by amorphous BN phase. The micro-hardness of Ti-B-C-N coatings steeply increased from ∼ 21 GPa of Ti-C-N up to ∼ 42 GPa of Ti-B(9 at.%)-C-N films. In addition, Ti-B-C-N coatings showed the lowest average friction coefficient compared with other coatings of TiN, TiC, and Ti-C-N coatings prepared under the same PECVD condition. A systematic investigation of the microstructure and mechanical properties of Ti-B-C-N coatings with various boron contents is reported in this paper.

Ti-Al-N-Based Hard Coatings: Thermodynamical Background, CVD Deposition, and Properties. A Review

IntechOpen eBooks, 2019

For several decades, the increasing productivity in many industrial domains has led to a significant and ever-increased interest to protective and hard coatings. In this context, titanium-aluminum nitrides were developed and are now widely used in a large range of applications, due to their high hardness, good thermal stability, and oxidation resistance. This chapter reviews the thermodynamical characteristics of the Ti-Al-N system by reporting the progress made in the description of the Ti-Al-N phase diagram and the main mechanical and chemical properties of Ti 1Àx Al x N-based coatings. As a metastable phase, the existence of the fcc-Ti 1Àx Al x N depends on particular process parameters, allowing stabilizing this desirable solid solution. The influence of process parameters, with a particular interest for chemical vapor deposition (CVD) methods, on morphology and crystallographic structure is then described. The structure of Ti 1Àx Al x N thin films depends also on the aluminum content as well as on the annealing temperature, due to the spinodal nature of the Ti-Al-N system. These changes of crystallographic structure can induce an improvement of the hardness, oxidation resistance, and wear behavior of these coatings. The main mechanical and chemical properties of physical vapor deposition (PVD) and CVD Ti 1Àx Al x N-based coatings are also described.

Provisional chapter Ti-Al-N-Based Hard Coatings: Thermodynamical Background, CVD Deposition, and Properties. A Review

Coatings and Thin-Film Technologies, 2019

For several decades, the increasing productivity in many industrial domains has led to a significant and ever-increased interest to protective and hard coatings. In this context, titanium-aluminum nitrides were developed and are now widely used in a large range of applications, due to their high hardness, good thermal stability, and oxidation resistance. This chapter reviews the thermodynamical characteristics of the Ti-Al-N system by reporting the progress made in the description of the Ti-Al-N phase diagram and the main mechanical and chemical properties of Ti 1Àx Al x N-based coatings. As a metastable phase, the existence of the fcc-Ti 1Àx Al x N depends on particular process parameters, allowing stabilizing this desirable solid solution. The influence of process parameters, with a particular interest for chemical vapor deposition (CVD) methods, on morphology and crystallographic structure is then described. The structure of Ti 1Àx Al x N thin films depends also on the aluminum content as well as on the annealing temperature, due to the spinodal nature of the Ti-Al-N system. These changes of crystallographic structure can induce an improvement of the hardness, oxidation resistance, and wear behavior of these coatings. The main mechanical and chemical properties of physical vapor deposition (PVD) and CVD Ti 1Àx Al x N-based coatings are also described.

Deposition and characterization of Ti-Al-C-N coatings

IOP Conference Series: Materials Science and Engineering, 2020

In the present work, Ti-Al-C-N coatings were deposited on cemented carbide substrates by lateral rotating cathodes (LARC®) process using Platit π80+DLC deposition unit. The effect of C2H2 gas flow rate on elemental and phase composition, deposition rate, cross-sectional and surface morphology, mechanical and tribological properties of the coatings was studied. Following analytical techniques, namely: scanning electron microscopy (SEM) with energy and wave dispersive X-ray spectroscopy (EDS and WDS), X-ray diffraction analysis (XRD), nanoindentation measurements, Rockwell C indentation test and tribological testing were used for Ti-Al-C-N coatings evaluation. From the EDS analysis, it was found that the carbon content in the coatings increased from 0 at.% to 22.3 at.% as the C2H2 gas flow rate increased from 0 sccm to 75 sccm. The increase in deposition rate of coatings from 0.029 μm/min to 0.052 μm/min was documented. From XRD results it was found that the coatings consist of a cubi...

Wear resistance investigation of titanium nitride-based coatings

Ceramics International, 2015

The wear of components while they are in service is a predominant factor controlling the life of machine components. Metal parts are often damaged because of wear-driven failures causing the loss of dimensions and functionality.

Analysis of morphological, microstructural, electrochemical and nano mechanical characteristics of TiCN coatings prepared under N2 gas flow rate by chemical vapour deposition (CVD) process at higher temperature

Ceramics International, 2020

In the present study, Titanium carbon nitride (TiCN) thin films have been synthesized over Si (100) substrate using chemical vapour deposition (CVD) process under N 2 gas flow rate to study the suitability of CVD for the growth of TiCN coating over machine tools. The morphological, structural, corrosion behavior and mechanical properties of the coatings have been characterized using a scanning electron microscope (SEM), atomic force microscopy (AFM), x-ray diffraction (XRD), corrosion test and Nano-indentation. SEM images revealed a smoother morphology of the TiCN coating surface without any pores. The AFM results revealed an increase in surface roughness from 40.88 nm to 48.25 nm. The particle size of TiCN thin film also found to be increasing with a higher N 2 flow rate. The XRD peaks of TiCN were observed in the range of 37°-38°. 44°-44.5°and 61°-62°a ttributed to (111), (200) and (220) crystal plane. The XRD results also confirmed the presence of stress in the coatings. The polarization test indicates a reduction of corrosion resistance with a higher N 2 gas flow rate. The mechanical properties investigated by the nano-indentation method indicated an increase in Hardness (H) and Young's modulus (E) of the coating with a higher N 2 flow rate. The maximum H and E of the coatings were observed as 27.85 GPa and 486.22 GPa respectively.

Optimization of PVD Parameters for the Deposition of Ultrahard Ti–Si–B–N Coatings

1999

Multicomponent Ti-Si-B-N coatings were deposited on high-speed steel (HSS) substrates by reactive magnetron sputtering using a SHS TiB + 20 wt% Si target. The influences of the substrate temperature, bias voltage, and nitrogen partial pressure on the structure and the elemental compositions of the films were studied. The films were characterized by high-resolution transmission electron microscopy (HRTEM), Auger spectroscopy (AES), and X-ray diffraction (XRD). The results of HRTEM analysis indicated the formation of an ordered-disordered structure with fine crystalline grains of hexagonal Ti(B,N)A phase and amorphous integrain layers. The stoichiometry of the Ti(B,N)x phase was strongly affected by PVD process parameters. The films were characterized in terms of their microhardness and wear resistance. The reasons for the high value of microhardness appear to be the result of stoichiometric phase composition, compressive residual stress, and dense and fine microstructure of the Ti-Si-B-N coatings. The tribological wear test results indicated the superior wear-resistant properties of Ti-Si-B-N coatings compared to TiN and Ti(C,N) coatings.

Effect of Si addition on microstructure and mechanical properties of Ti–Al–N coating

International Journal of Refractory Metals and Hard Materials, 2010

Ti-Al-N coatings are widely used to prevent the untimely consumption of cutting tools exposed to wear. Increasing requirements on high speed and dry cutting application open up new demands on the quality of wearprotective quaternary or multinary Ti-Al-N based coating materials. Here, we investigated the microstructure and mechanical properties of Ti-Al-N and Ti-Al-SiN coatings deposited on cemented carbide by cathodic arc evaporation. The formation of nanocomposite nc-TiAlN/a-Si 3 N 4 structure by incorporation of Si into Ti-Al-N coating causes a significant increase on hardness from ∼35.7 GPa of Ti-Al-N to ∼42.4 GPa of Ti-Al-SiN. Both coatings behave age-hardening during thermal annealing, however Ti-Al-SiN coating reveal better thermal stability. Therefore, the improved cutting performance of Ti-Al-SiN coated inserts is obtained compared to Ti-Al-N coated inserts.