Stochastic resonance in MEMS capacitive sensors (original) (raw)
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Stochastic resonance in electrical circuits. I. Conventional stochastic resonance
Circuits and Systems …, 1999
Stochastic resonance (SR), a phenomenon in which a periodic signal in a nonlinear system can be amplified by added noise, is introduced and discussed. Techniques for investigating SR using electronic circuits are described in practical terms. The physical nature of SR, and the explanation of weak-noise SR as a linear response phenomenon, are considered. Conventional SR, for systems characterized by static bistable potentials, is described together with examples of the data obtainable from the circuit models used to test the theory.
Frequency Dependent Noise Analysis and Damping in MEMS
The paper presents a combined noise and damping analysis for MEMS structures, based on frequency-dependent behavioral models extracted from finite element simulations. The design of high sensitivity MEMSbased microsystems needs to consider the frequency noise shaping induced by damping phenomena on micro scale motion, for its contribution can be significant in the system level noise analysis. Frequency-dependent behavioral models for squeeze-film damping are generated from finite element analysis simulations. Unlike existing noise analysis reported in literature, based on frequency-independent damping assumption, the paper integrates the damping and noise aspects using the same frequency-dependent models. The results can be used for a noise-based optimization procedure applied to the design of resonating microsensors, as illustrated for the case of a MEMS-based gyroscope.
Measurement Science and Technology, 2010
This review provides a comprehensive survey of noise research in MEMS. Some background on noise and on MEMS is provided. We review noise production mechanisms, and highlight work on the theory and modeling of noise in MEMS. Then noise measurements in the specific types of MEMS are reviewed. Inertial MEMS (accelerometers and angular rate sensors), pressure and acoustic sensors, optical MEMS, RF MEMS, surface acoustic wave devices, flow sensors, and chemical and biological MEMS, as well as data storage devices and magnetic MEMS, are reviewed. We indicate opportunities for additional experimental and computational research on noise in MEMS.
Joint Effect of Heterogeneous Intrinsic Noise Sources on Instability of MEMS Resonators
Electronics ETF
This article's focus is on the numerical estimation of the overall instability of microelectromechanical-system-based (MEMS) resonators, caused by intrinsic noise mechanisms that are different in nature (electrical, mechanical or chemical). Heterogeneous intrinsic noise sources in MEMS resonators that have been addressed here are Johnson–Nyquist noise, 1/f noise, noise caused by temperature fluctuations and adsorptiondesorption induced noise. Their models are given first (based on analytical modeling or based on empirical expressions with experimentally obtained parameters). Then it is shown how each one contributes to the phase noise, a unique figure of merit of resonators instability. Material dependent constants and knee position in noise spectrum, needed for empirical formulae referring to 1/f noise, have been obtained experimentally, by measurements of noise of MEMS components produced in the Centre of Microelectronic Technologies of the Institute of Chemistry, Technology...
Improved Detection of Magnetic Signals by a MEMS Sensor Using Stochastic Resonance
We introduce the behavior of the electrical output response of a magnetic field sensor based on microelectromechanical systems (MEMS) technology under different levels of controlled magnetic noise. We explored whether a particular level of magnetic noise applied on the vicinity of the MEMS sensor can improve the detection of subthreshold magnetic fields. We examined the increase in the signal-to-noise ratio (SNR) of such detected magnetic fields as a function of the magnetic noise intensity. The data disclosed an inverted U-like graph between the SNR and the applied magnetic noise. This finding shows that the application of an intermediate level of noise in the environment of a MEMS magnetic field sensor improves its detection capability of subthreshold signals via the stochastic resonance phenomenon.
Stochastic Resonance on a piezoelectric cantilever both mechanically and electrically driven
The increasing power and energy consumption of modern computing devices is perhaps the largest threat to technology minimization and associated gains in performance and productivity. If we want to effectively address the ICT-energy issue we need to but will not change the future of ICT. At the architecture level we need new computing architecture paradigms that are extremely more energy efficient.
Journal of Microelectromechanical Systems, 2017
This paper presents the investigation of two different capacitive feedthrough current elimination methods with an analysis of the effect of the capacitive feedthrough current on the resonance characteristics of electrostatically actuated and sensed resonant MEMS sensors. Electrostatically actuated and sensed resonators have various applications, such as accelerometers, gyroscopes, mass sensors, and temperature sensors. In most of these applications, as sensitivity increases, gain decreases. The capacitive feedthrough current between the drive and sense electrodes disturbs the resonance characteristics of the resonator, especially when the gain is rather small. In order to eliminate the dominating feedthrough current in such cases, two methods were proposed. In the first method, differential input signals were applied to two separate resonators, one active and one passive, sharing the same sense electrode. Although this method seems to be easily applicable to all types of resonators, this study has shown that mismatches between the resonator pair prevent perfect elimination of the feedthrough current. In the second method, a novel lateral electrostatic resonator with differential sense electrodes was designed and fabricated to eliminate the feedthrough current. Measurements showed that the feedthrough effect was successfully eliminated and 27 times higher SNR dB was achieved with this method. Moreover, it was successfully demonstrated that any mismatch can be compensated by a simple resistive adjustment. [2016-0288] Index Terms-Differential reading, feedthrough current, MEMS, resonator. I. INTRODUCTION R ESONATING structures are widely used in MEMS based sensors, such as accelerometers and gyroscopes. Recently, mass and temperature sensors that depend on resonance frequency shifts have become popular [1]-[4]. Especially resonators for bio-mass detection promise breakthrough products [5]. Performance of such sensors depends highly on the precise determination of the resonance frequency.
Use of Electromechanical Feedback in MEMS for Suppressing Electronics Noise
Procedia Engineering, 2012
At the pull-in point, a capacitive MEMS sensor becomes infinitely sensitive to applied force as the effective spring constant goes to zero because of electromechanical feedback We show that this phenomenon can be used to fully eliminate the noise contribution of readout electronics. Experimentally, we show that the electronics noise and interference contribution to system resolution could be suppressed by an order of magnitude, reaching the intrinsic resolution of the MEMS microphone. Experiments are in good agreement with a theory based on a small signal model of a harmonic MEMS oscillator. The technique allows the use of standard integrated electronics with noise-critical MEMS sensors, such as microphones, pressure sensors and accelerometers.
Stochastic resonance in electrical circuits. II. Nonconventional stochastic resonance
Circuits and Systems …, 1999
Stochastic resonance (SR), in which a periodic signal in a nonlinear system can be amplified by added noise, is discussed. The application of circuit modeling techniques to the conventional form of SR, which occurs in static bistable potentials, was considered in a companion paper. Here, the investigation of nonconventional forms of SR in part using similar electronic techniques is described. In the small-signal limit, the results are well described in terms of linear response theory. Some other phenomena of topical interest, closely related to SR, are also treated.