Surface Area Enhancement of Nanomechanical Disk Resonators Using MWCNT for Mass Sensing Applications (original) (raw)
2018, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
This work presents fabrication of thermalpiezoresistive nanoelectromechanical (NEM) silicon disk resonators and their characterization as highly sensitive mass sensors. Forest of multiwall carbon nanotubes (MWCNT) has been grown on top surface of the fabricated devices increasing the resonator effective surface area, which in turn increases the adsorption capacity and therefore frequency shift of the sensor in molecular or particulate detection applications. To investigate the effect of the enhanced surface area on frequency shift, devices with and without MWCNTs were exposed to an aqueous solution of manganese sulfate for different deposition times and the resonance frequency shift was recorded accordingly. The measured frequency shift for the devices covered with MWCNTs was 14X higher than similar bare silicon devices. Furthermore, mass loading experiments were performed using gold nanoparticles as loading mass. A novel way to attach gold nanoparticles on the CNTs wall was developed here. Oxygen plasma treatment introduced dangling bonds on the MWCNTs walls to facilitate bonding between them and trimethoxysilane aldehyde molecules forming the surface assembly monolayer (SAM). After functionalization of the device with SAM and anti-influenza H1N1 viruses (AB), the device was exposed to a solution of Anti-Mouse IgG (whole molecule)-Gold antibody produced in goat products. The results showed more than 3 times response enhancement for the resonators with MWCNTs.
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