Cathodo- and Photo- Luminescence of Silicon Rich Oxide Films Obtained by LPCVD (original) (raw)

2012, Cathodoluminescence

AI-generated Abstract

This study explores the cathodo- and photo-luminescence properties of Silicon Rich Oxide (SRO) films produced via Low Pressure Chemical Vapor Deposition (LPCVD). It highlights the significance of silicon excess and thermal annealing on the optical characteristics of SRO films, which show promise for applications in light-emitting devices. The work presents a detailed investigation into the structural and compositional factors that influence luminescence, providing insights into the mechanism behind effectively tuning the film's optical properties.