Fabrication of microgrooves with excimer laser ablation techniques for plastic optical fiber array alignment purposes (original) (raw)
Related papers
An increase in interconnection density, a reduction in packaging sizes and the quest for lowcost product development strategy are some of the key challenges facing micro-optoelectronics design and manufacture. The influence of high-density, small-sized products has placed significant constraints on conventional electrical connections prompting various fabrication methods, e.g. photolithography, being introduced to meet these challenges and ameliorate the rapidly changing demand from consumers. While high-power solid state lasers are fundamental to large scale industrial production, excimer laser on the other hand has revolutionised the manufacturing industry with high precision, easy 3D structuring and less stringent production requirements. Micro-structuring using excimer laser, best known as laser ablation, is a non-contact micro- and nano-machining based on the projection of high-energy pulsed UV masked beam on to a material of interest such that pattern(s) on the mask is transferred to the substrate, often at a demagnified dimension with high resolution and precision. The use of mask with desired patterns and beam delivery system makes the fabrication in this case accurate, precise and easily controllable. The first part of this chapter introduces the fundamentals of laser technology and material processing. In the second part, optical interconnects as a solution to ‘bottlenecked’ conventional copper interconnections is introduced with emphasis on excimer laser ablation of polymer waveguides and integrated mirrors. Key research findings in the area of optical circuit boards using other techniques are also briefly covered. Cite : Zakariyah, S.S. (2012). Laser Ablation for Polymer Waveguide Fabrication, Micromachining Techniques for Fabrication of Micro and Nano Structures, Mojtaba Kahrizi (Ed.), ISBN: 978-953-307-906-6, InTech, Available from: http://www.intechopen.com/articles/show/title/laser-ablation-for-polymer-waveguide-fabrication.
Laser Ablation for Polymer Waveguide Fabrication
An increase in interconnection density, a reduction in packaging sizes and the quest for low-cost product development strategy are some of the key challenges facing micro-opto-electronics design and manufacture. The influence of high-density, small-sized products has placed significant constraints on conventional electrical connections prompting various fabrication methods, e.g. photolithography, being introduced to meet these challenges and ameliorate the rapidly changing demand from consumers. While high-power solid state lasers are fundamental to large scale industrial production, excimer laser on the other hand has revolutionised the manufacturing industry with high precision, easy 3D structuring and less stringent production requirements. Micro-structuring using excimer laser, best known as laser ablation, is a non-contact micro- and nano-machining based on the projection of high-energy pulsed UV masked beam on to a material of interest such that pattern(s) on the mask is transferred to the substrate, often at a demagnified dimension with high resolution and precision. The use of mask with desired patterns and beam delivery system makes the fabrication in this case accurate, precise and easily controllable. The first part of this chapter introduces the fundamentals of laser technology and material processing. In the second part, optical interconnects as a solution to ‘bottlenecked’ conventional copper interconnections is introduced with emphasis on excimer laser ablation of polymer waveguides and integrated mirrors. Key research findings in the area of optical circuit boards using other techniques are also briefly covered.
6 Laser Ablation for Polymer Waveguide Fabrication
2018
An increase in interconnection density, a reduction in packaging sizes and the quest for lowcost product development strategy are some of the key challenges facing micro-optoelectronics design and manufacture. The influence of high-density, small-sized products has placed significant constraints on conventional electrical connections prompting various fabrication methods, e.g. photolithography, being introduced to meet these challenges and ameliorate the rapidly changing demand from consumers. While high-power solid state lasers are fundamental to large scale industrial production, excimer laser on the other hand has revolutionised the manufacturing industry with high precision, easy 3D structuring and less stringent production requirements. Micro-structuring using excimer laser, best known as laser ablation, is a non-contact microand nano-machining based on the projection of high-energy pulsed UV masked beam on to a material of interest such that pattern(s) on the mask is transferr...
Advances in Materials Science and Engineering, 2018
Extending the data transfer rates through dense interconnections at inter- and intraboard levels is a well-established technique especially in consumer electronics at the expense of more cross talk, electromagnetic interference (EMI), and power dissipation. Optical transmission using optical fibre is practically immune to the aforementioned factors. Among the manufacturing methods, UV laser ablation using an excimer laser has been repeatedly demonstrated as a suitable technique to fabricate multimode polymer waveguides. However, the main challenge is to precisely control and predict the topology of the waveguides without the need for extensive characterisation which is both time consuming and costly. In this paper, the authors present experimental results of investigation to relate the fluence, scanning speed, number of shots, and passes at varying pulse repetition rate with the depth of ablation of an acrylate-based photopolymer. The depth of ablation essentially affects total inte...
Projection ablation of glass-based single and arrayed microstructures using excimer laser
Optics and Laser Technology, 2005
Ablation of single and arrayed microstructures using an excimer laser is studied. The single feature microstructures are fabricated for evaluating the ablation mechanism, threshold fluence, and associated material removing (ablation) rate. The morphology changes during ablation are investigated with the focus on the formation of the ablation defects, debris or recast. The possibility of removing these defects is also evaluated and demonstrated. The present study concentrates on the borosilicate glass, although ablation of polyimide and silicon are performed and discussed for comparison. Polyimide and silicon are the most popular polymer or semiconductor material used in the electronics industry. The arrayed microstructures are ablated to demonstrate the fact that, by repetition of a simple-patterned mask associated with synchronized laser pulses and substrate movement, arrayed and more complex structures can be cost-effectively manufactured. The potential applications of these arrayed microstructures are discussed and illustrated. A low-cost replication technique that uses the arrayed microstructure presently machined as the forming mold for making electroforming nickel microneedles is specifically presented. Finally, the potential areas of using excimer laser in micromachining of glass-based structures for future research are also briefly covered. r
Polymer optical waveguide fabrication using laser ablation
2009 11th Electronics Packaging Technology Conference, 2009
Due to their inherent bandwidth capacity, optical interconnects are replacing copper as bottlenecks begin to appear within the various interconnect levels of electronics systems. Current optical interconnect solutions found in industry are based upon optical fibres and are capable of providing a suitable platform for inter-board applications. However, to allow high speed interconnects between components and within systems, optically enabled printed circuit boards containing waveguides are essential. One way in which this can be accomplished is through the integration of polymer optical waveguides into traditional printed circuit boards (PCBs). There are a number of routes to accomplish this including photolithography and laser direct imaging, however, this paper explores laser ablation using UV and IR sources namely: 248 nm Excimer, 355 nm UV Nd:YAG and 10.6 µm CO 2 , to form waveguide structures in optical polymer materials. The paper presents the process route and initial results of trials conducted to fabricate waveguides and indicate the variation in the structures formed by the different lasers. The demonstration of the use of these three lasers for optical waveguide fabrication may provide a route to the rapid deployment of this technology into the PCB industry through the use of existing infrastructure.
AIP Conference Proceedings, 2015
Micro structured optical plastics components are intensively used i. e. in consumer electronics, for optical sensors in metrology, innovative LED-lighting or laser technology. Injection moulding has proven to be successful for the large-scale production of those parts. However, the production of those parts still causes difficulties due to challenges in the moulding and demoulding of plastics parts created with laser structured mould inserts. A complete moulding of the structures often leads to increased demoulding forces, which then cause a breaking of the structures and a clogging of the mould. An innovative approach is to combine PVD-coated (physical vapour deposition), laser structured inserts and a variothermal moulding process to create functional mic8iüro structures in a one-step process. Therefore, a PVD-coating is applied after the laser structuring process in order to improve the wear resistance and the anti-adhesive properties against the plastics melt. In a series of moulding trials with polycarbonate (PC) and polymethylmethacrylate (PMMA) using different coated moulds, the mould temperature during injection was varied in the range of the glass transition and the melt temperature of the polymers. Subsequently, the surface topography of the moulded parts is evaluated by digital 3D laser-scanning microscopy. The influence of the moulding parameters and the coating of the mould insert on the moulding accuracy and the demoulding behaviour are being analysed. It is shown that micro structures created by ultra-short pulse laser ablation can be successfully replicated in a variothermal moulding process. Due to the mould coating, significant improvements could be achieved in producing micro structured optical plastics components.
Integrated Optics: Theory and Applications, 2005
A qualitative comparison is made between laser direct writing and laser ablation as enabling technologies for the structuring of multimode waveguides (50x50µm 2 ) and 45º micro-mirrors into an optical layer. A small demonstrator is fabricated that allows us to couple light vertically from a transmitter into an optical layer and from the optical layer to a receiver. The optical layer, a multifunctional acrylate-based photo-polymer, is applied on an FR4-substrate. Multimode waveguides, that carry signals in the plane of the optical layer, are fabricated by means of laser direct writing, a technology that is available at HWU. The 45° micro-mirrors, that provide out-of-plane coupling, are ablated with the laser ablation set-up available at UGent. This set-up contains a KrF-excimer laser (248nm) that can be tilted, which eases the definition of angled facets. Surface roughness measurements are performed on both the optical layer and the micro-mirrors with a non-contact optical profiler. Loss measurements are performed on both the waveguides and the micro-mirrors.
High aspect-ratio micromachining of polymers with an ultrafast laser
Applied Surface Science, 2002
Laser ablation of various polymers has been studied using a beam of 100 fs laser pulses at a wavelength of 800 nm. For a beam focussed by a plano-convex lens, high-quality machining of holes with diameters 20±40 mm and depths 300±400 mm (aspect ratio greater than 10) has been achieved. When projection patterning is carried out with a rectangular pinhole, arrays of micro-strings have been observed deep in the bulk of the sample. The micro-strings have diameters as small as 2 mm (about three times the wavelength) and lengths greater than 10 mm (aspect ratio 5000). The achievement of the high aspect ratios and the formation of the arrays of micro-strings are discussed. #